CMP Pad Cooling Nozzle With Air Entrainment for Temperature Uniformity

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Solution Overview

Problem

Existing chemical mechanical polishing (CMP) processes struggle with temperature control, leading to non-uniformity and issues like dishing, corrosion, and reduced polishing pad lifespan due to temperature variations.

Innovation Solution

A system that includes a pad cooling assembly with a nozzle supported by an arm, spraying coolant fluid onto the polishing pad while entraining air from an opening in the arm, enhancing cooling efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If coolant fluid is sprayed onto the polishing pad, then the polishing pad temperature is reduced, but the cooling efficiency is insufficient leading to temperature non-uniformity

Engineering Contradiction:

Improvepolishing pad temperatureVSAvoidtemperature uniformity

Core Design Contradiction:

TemperatureVSManufacturing precision

Solution Approach 1:

The patent applies pneumatic principles by introducing gas (air or nitrogen) flow through openings in the support arm to enhance the cooling effect. The gas flow creates turbulence and improves heat transfer efficiency from the polishing pad surface, addressing the insufficient cooling efficiency and temperature non-uniformity issues while maintaining reduced pad temperature.

Inventive Principle:

Principle #29Pneumatics and hydraulics

Solution Approach 2:

The patent changes the physical state and flow parameters of the cooling medium by combining liquid coolant spray with gaseous flow. This dual-phase approach modifies the heat transfer coefficients and flow dynamics, enabling more effective and uniform temperature control across the polishing pad surface.

Inventive Principle:

Principle #35Parameter changes

2Temperature

If more coolant is used to improve cooling, then temperature control improves, but energy consumption increases

Engineering Contradiction:

Improvepolishing pad temperature controlVSAvoidcooling energy consumption

Core Design Contradiction:

TemperatureVSUse of energy by moving object

Solution Approach 1:

The patent uses gas flow to enhance cooling efficiency, allowing for reduced coolant fluid consumption while maintaining effective temperature control. The pneumatic assistance improves heat transfer without requiring proportional increases in coolant flow, thereby reducing the energy required for pumping and cooling.

Inventive Principle:

Principle #29Pneumatics and hydraulics

Solution Approach 2:

The gas flow from the support arm openings provides self-cooling assistance by creating natural convection and turbulence patterns that enhance heat removal from the polishing pad, reducing the workload and energy consumption of the primary coolant delivery system.

Inventive Principle:

Principle #25Self-service

3Temperature

If gas flow is added to enhance cooling, then cooling efficiency improves, but the system complexity increases

Engineering Contradiction:

Improvecooling efficiencyVSAvoidcooling system complexity

Core Design Contradiction:

TemperatureVSDevice complexity

Solution Approach 1:

The support arm structure serves multiple functions: it provides mechanical support for the nozzle, delivers coolant fluid through the nozzle, and simultaneously introduces gas flow through openings in the arm. This multi-functionality enhances cooling efficiency without requiring separate gas delivery components, thereby minimizing system complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the coolant delivery function with the gas flow introduction function into a single integrated support arm assembly. The openings in the support arm are positioned to work in conjunction with the nozzle, combining liquid and gas flows to achieve enhanced cooling without adding separate complex gas delivery mechanisms.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Improves temperature uniformity and extends polishing pad life by efficiently controlling pad temperature, reducing dishing and corrosion, and enhancing polishing uniformity.

Implementation Method 1

a nozzle positioned to spray coolant fluid from the source onto the polishing surface of the polishing pad

Methodology Applied

Scientific EffectFluid spray: Fluid Spray

Implementation Method 2

the opening positioned sufficiently close to the nozzle that a flow of coolant fluid from the nozzle entrains air from the opening

Methodology Applied

Scientific EffectAir entrainment: Air Entrainment

Data Source

PatentUS12528151B2Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing

Publication Date: 2026.01.20 APPLIED MATERIALS INC

AI summary

A chemical mechanical polishing system includes a platen to support a polishing pad having a polishing surface, and a pad cooling assembly. The pad cooling assembly has an arm extending over the platen, a nozzle suspended by the arm and coupled to a source of coolant fluid, the nozzle positioned to spray coolant fluid from the source onto the polishing surface of the polishing pad, and an opening in the arm adjacent the nozzle and a passage extending in the arm from the opening, the opening positioned sufficiently close to the nozzle that a flow of coolant fluid from the nozzle entrains air from the opening.