CMP Retainer Ring Curved Flow Path Design

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

The existing chemical mechanical polishing (CMP) apparatuses face challenges in fluid flow management, including overflow, backflow, and stagnation, due to the limitations of the inclined surface design in the retainer ring.

Innovation Solution

The proposed retainer ring design for the CMP apparatus includes an inner ring and an outer ring with a fluid flow path defined by the outward-facing surface of the inner ring and the inward-facing surface of the outer ring, featuring at least one lower curved portion and optionally a lower straight-line portion to facilitate smooth fluid flow.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the flow path is designed only with an inclined surface, then the structure is simple, but it is difficult to change the slope or size of the flow path

Engineering Contradiction:

Improvestructural simplicityVSAvoidflow path design flexibility

Core Design Contradiction:

Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The flow path surface is segmented into multiple portions (first flow path portion, second flow path portion, third flow path portion) with different slope characteristics. This segmentation allows each portion to be independently designed with optimal slope angles, enabling flexible adjustment of the overall flow path geometry without complicating the manufacturing process.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The flow path incorporates curved surfaces instead of purely linear inclined surfaces. The curved flow path portions enable smooth transitions and variable slopes, providing design flexibility while maintaining manufacturability through standard machining operations for curved surfaces.

Inventive Principle:

Principle #14Spheroidality (Curvature)

2Adaptability or versatility

If the slope of the inclined surface is changed, then the flow path characteristics change, but a large change in the area of the upper plate region occurs

Engineering Contradiction:

Improveflow path slope adjustabilityVSAvoidupper plate region area

Core Design Contradiction:

Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

By dividing the flow path into multiple segmented portions with different slope characteristics, the design can adjust flow path slopes locally without requiring large changes to the overall upper plate region area. Each segment can be optimized independently.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The flow path design utilizes three-dimensional spatial arrangement with curved and inclined portions, allowing slope adjustments in the flow path direction without proportionally increasing the planar area of the upper plate region. This dimensional approach enables slope variation with minimal area penalty.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If the flow path is designed with fixed geometry, then manufacturing is easy, but fluid backflow and stagnation occur

Engineering Contradiction:

Improvemanufacturing simplicityVSAvoidfluid flow performance

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The flow path incorporates curved surfaces and smooth transitions instead of sharp angles or linear segments. This curvature design promotes continuous fluid flow, prevents stagnation zones, and eliminates backflow while remaining manufacturable through standard curved surface machining operations.

Inventive Principle:

Principle #14Spheroidality (Curvature)

Solution Approach 2:

Different portions of the flow path are designed with locally optimized characteristics (different slopes, curved vs. inclined sections) to ensure appropriate flow dynamics in each region. This local quality approach prevents stagnation in specific areas while maintaining overall manufacturing simplicity.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively prevents fluid overflow and stagnation by ensuring smooth fluid flow between the inner and outer rings, enhancing the operational efficiency of the CMP apparatus.

Implementation Method 1

at least one lower curved portion of the inward-facing surface of the outer ring may correspond to a region where the chemical solution or the cleaning solution easily moves

Methodology Applied

Scientific EffectFluid flow:

Data Source

PatentUS20250170686A1Retainer ring for chemical mechanical polishing apparatus and chemical mechanical polishing apparatus including the same

Publication Date: 2025.05.29 SAMSUNG ELECTRONICS CO LTD

AI summary

The present disclosure relates to a retainer ring for a chemical mechanical polishing apparatus and a chemical mechanical polishing apparatus including the same, and the retainer ring of a head portion in a chemical mechanical polishing apparatus includes: an inner ring configured to surround a circumference edge of a wafer; an outer ring surrounding the inner ring; and a fluid flow path formed between the inner ring and the outer ring, the fluid flow path defined by an outward-facing surface of the inner ring and an inward-facing surface of the outer ring. The inward-facing surface of the outer ring includes at least one lower curved portion.