CMP Retainer Ring Metallic Insert for Coupling Force
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Solution Overview
Problem
The existing retainer ring structures for CMP apparatuses, formed with resin materials, have low strength, leading to uneven wear and increased manufacturing costs due to complex processes, and result in a low coupling force with the polishing head.
Innovation Solution
A retainer ring structure comprising an insert ring made of two or more metallic materials, with metallic insert pins of higher strength and a chamfered design, integrated with a resin outer ring to enhance coupling force and simplify manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the retainer ring is formed of a resin material, then the manufacturing cost is reduced, but the strength and coupling force with the polishing head are insufficient
Solution Approach 1:
The retainer ring is constructed as a composite structure with an inner ring made of high-strength metallic material and an outer ring made of resin material. This composite design allows the metallic inner ring to provide the necessary strength and coupling force for the screw part, while the resin outer ring maintains cost-effectiveness and provides the required chemical inertness and wear resistance.
Solution Approach 2:
Different parts of the retainer ring are made from different materials according to their specific functional requirements. The screw coupling part (inner ring) uses metallic material for high strength, while the outer covering ring uses resin material for cost-effectiveness and chemical resistance. This local differentiation of material properties optimizes both strength and manufacturing cost.
2Ease of manufacture
If the retainer ring is formed of a resin material, then the manufacturing cost is reduced, but uneven wear occurs due to imbalance of force
Solution Approach 1:
The composite structure with metallic inner ring and resin outer ring distributes mechanical forces more evenly. The high-strength metallic inner ring provides structural support and force balance, preventing the resin outer ring from experiencing excessive localized stress that would cause uneven wear.
3Strength
If a retainer ring structure with inner ring and outer ring is used, then the coupling force is improved, but the manufacturing process becomes complex and time-consuming
Solution Approach 1:
The metallic inner ring is pre-formed with the screw part and coupling features before being assembled with the resin outer ring. This preliminary formation of the critical metallic component allows for optimized manufacturing of the high-strength part separately, then integration with the outer ring, reducing overall process complexity.
4Ease of manufacture
If the screw part is formed of a resin material, then the manufacturing cost is reduced, but local deformation occurs when the fastening screw is coupled
Solution Approach 1:
The screw part is specifically designed as a metallic component within the composite retainer ring structure. The high-strength metallic material provides the necessary rigidity and dimensional stability to prevent local deformation during screw coupling, while the overall structure remains cost-effective due to the resin outer ring.
Data Source
AI summary
The present invention relates to a retainer ring structure for a CMP apparatus and a method for manufacturing the same. The retainer ring structure may include screws for fixing the retainer ring structure mounted on a polishing head during a CMP process, the screw being made of a high-strength metallic material, and the method for manufacturing the retainer ring structure may be simplified. Thus, a coupling force with the polishing head may be increased to reduce a defect rate, and the process may be simplified to reduce an operation time and a manufacturing cost, thereby increasing merchantability.