CMP Slurry Dispense Nozzle With Isolated Valve for Uniform Flow
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Solution Overview
Problem
Conventional chemical mechanical polishing (CMP) systems face issues with slurry distribution control, leading to slurry waste and metal contamination due to metallic components, and complex flow paths causing agglomeration.
Innovation Solution
The development of slurry dispensing nozzles with non-metallic materials, simple flow paths, and modular design, featuring a valve member that isolates actuators from the slurry, allowing for adjustable position and flow rate control, and separate components for easy cleaning and replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional point dispensing systems are used to deliver slurry, then the system structure is simple, but slurry distribution uniformity is poor and slurry waste increases
Solution Approach 1:
The dispensing system is segmented into multiple nozzle assemblies arranged in an array, with each nozzle delivering slurry to a specific zone on the polishing pad. This segmentation enables precise control of slurry distribution across different areas, improving uniformity while reducing overall slurry waste through targeted delivery.
Solution Approach 2:
The nozzle assembly incorporates adjustable positioning mechanisms that allow dynamic adjustment of nozzle positions and orientations. This enables optimization of slurry delivery angles and locations to achieve uniform distribution across the polishing pad surface, while the ability to adjust flow rates provides dynamic control over slurry consumption.
2Reliability
If metallic components are used in the slurry delivery system, then the structure is durable, but metal contamination occurs
Solution Approach 1:
Metallic components are extracted from the slurry delivery path. The nozzle body, internal flow channels, and slurry-contacting surfaces are constructed from non-metallic materials such as ceramic or polymer, eliminating the source of metal contamination while maintaining structural integrity and durability through careful material selection and design.
Solution Approach 2:
The material parameters of components in contact with slurry are changed from metallic to non-metallic materials. This parameter change eliminates metal contamination while the selected non-metallic materials (ceramics, polymers) provide comparable or superior chemical resistance and durability for slurry delivery applications.
3Ease of operation
If complex flow paths are designed in the nozzle, then flow control is precise, but agglomeration occurs
Solution Approach 1:
Instead of using complex internal flow paths to control slurry delivery, the design inverts the approach by using simple, direct flow channels combined with external positioning and flow rate adjustment mechanisms. This simplifies the internal geometry, preventing agglomeration while maintaining precise flow control through adjustable parameters at the nozzle entrance and exit.
Solution Approach 2:
The nozzle design applies local quality optimization by creating specific flow conditions at critical locations (such as rounded entrance radii and controlled exit geometries) rather than requiring complex flow paths throughout. This local optimization prevents agglomeration at key points while maintaining simple overall geometry, achieving both uniform flow and manufacturing simplicity.
4Ease of operation
If actuators are positioned directly in the slurry reservoir, then flow rate control is direct, but contamination and wear increase
Solution Approach 1:
An intermediary non-metallic barrier or sealing mechanism is introduced between the actuator and the slurry reservoir. This allows the actuator to control flow rate remotely without direct contact with slurry, preventing contamination and wear of the actuator while maintaining direct flow control capability through the intermediary mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances slurry distribution uniformity, reduces metal contamination, prevents agglomeration, and extends nozzle lifespan by isolating actuators from the slurry, improving polishing efficiency and precision.
Implementation Method 1
The actuator may include one or both of a solenoid actuator and a piezoelectric actuator
Implementation Method 2
The actuator may include one or both of a solenoid actuator and a piezoelectric actuator
Implementation Method 3
The valve member may isolate the actuator from the slurry reservoir
Data Source
AI summary
Exemplary slurry delivery systems may include a slurry source. The systems may include a slurry line coupled with the slurry source. The systems may include a slurry dispensing nozzle. The nozzle may include a lumen having an inlet that is fluidly coupled with a slurry outlet of the slurry line. The nozzle may include a body defining a reservoir and an exit port. The reservoir may be fluidly coupled with a downstream end of the lumen. The exit port may be coupled with the reservoir. The nozzle may include a valve seat. The nozzle may include a valve member having a first surface positioned against the valve seat when in a closed position. The valve member may be movable to an open position in which the first surface is spaced apart from the valve seat. The nozzle may include an actuator coupled with a second surface of the valve member.