CMP Sponge Brush Replacing Tool Hinge Mechanism
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Solution Overview
Problem
In the Chemical Mechanical Polishing (CMP) process, manual replacement of sponge brushes leads to contamination, affecting cleaning efficacy and resulting in residual particles on wafers.
Innovation Solution
A replacing tool with a hinge or sliding mechanism, featuring hooks and beams, is used to securely engage and detach the sponge brush from driven and driving shafts, minimizing operator contact and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If manual replacement of sponge brush is performed, then labor cost is reduced, but sponge brush contamination occurs affecting cleaning capability
Solution Approach 1:
The sponge brush replacement system enables self-service through automated robotic manipulation. The robot gripper automatically grasps, detaches, and replaces sponge brushes without human intervention, allowing the system to serve itself while maintaining contamination-free operation and preserving cleaning capability.
Solution Approach 2:
The robot gripper acts as an intermediary between the operator and the sponge brush. Instead of direct manual handling, the gripper mediates the replacement process by mechanically grasping and manipulating the sponge brush, thereby preventing contamination while enabling efficient replacement.
2Reliability
If automated replacing tool is used, then contamination is reduced, but device complexity increases
Solution Approach 1:
The robot gripper is designed with multi-functionality to perform multiple operations: grasping the sponge brush body, detaching it from the driven shaft, grasping the driving shaft, and installing the new sponge brush. This universal design consolidates multiple functions into a single device, reducing overall system complexity while maintaining contamination-free operation.
Solution Approach 2:
The replacement system merges the functions of detection, grasping, detachment, and installation into a single integrated robot gripper system. By combining these operations into one automated unit, the system reduces the number of separate components and simplifies the overall replacement process while ensuring reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The tool effectively reduces sponge brush contamination during replacement, improving wafer surface cleanliness, reducing consumable waste, and saving labor costs by ensuring precise and contamination-free installation.
Implementation Method 1
The connection mechanism is a hinge mechanism. The hinge mechanism includes a first connection sheet, a rotating shaft, and a second connection sheet. The first connection sheet is rotatably connected to the second connection sheet through the rotating shaft.
Implementation Method 2
The sliding structure is arranged on the second beam, and the first beam is provided with a sliding hole which is slidably matched with the sliding structure. One end of the return spring is connected to the first beam, and another end of the return spring is connected to the second beam.
Implementation Method 3
The connection mechanism is a sliding mechanism including a sliding structure and a return spring. The sliding structure is arranged on the second beam, and the first beam is provided with a sliding hole which is slidably matched with the sliding structure.
Data Source
AI summary
The replacing tool includes a first beam, a connection mechanism, a second beam, a first hook, and a second hook. The first beam is connected to the second beam through the connection mechanism. The first hook is fixedly connected to the first beam, and a portion of the first hook is configured to be engaged into a concave end of the sponge brush. The second hook is fixedly connected to the second beam, and a portion of the second hook is arranged around a convex end of the sponge brush. The first beam and the second beam are movable relative to each other, so that the first hook is engaged with or detached from the concave end of the sponge brush and the second hook is engaged with or detached from the convex end of the sponge brush.