Coaxial Plasma Coating for Heat-Sensitive Wired Substrates
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Solution Overview
Problem
Existing post-discharge plasma coating devices are not suitable for organic or heat-sensitive substrates due to high energy density plasma, which can degrade precursors and substrates, and often result in ineffective coating processes.
Innovation Solution
A post-discharge plasma coating device with a coaxial configuration of inner and outer tubular electrodes, where the inner electrode extends beyond the outer electrode, and a dielectric barrier discharge is used to produce a low energy density plasma, allowing for direct contact between the plasma excited gas and the substrate in a coating area, while protecting the substrate from high energy plasma particles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high energy density plasma is used for coating, then coating efficiency is improved, but substrate and precursor degradation occurs
Solution Approach 1:
The plasma generation zone is segmented from the coating zone using a dielectric barrier. The plasma is generated in a controlled region between electrodes, then the activated species flow through the dielectric barrier into a separate coating region where deposition occurs without direct plasma contact, thus maintaining coating efficiency while preventing substrate degradation
Solution Approach 2:
A dielectric barrier is introduced as an intermediary between the plasma generation zone and the substrate. This dielectric layer allows activated species to pass through while blocking direct plasma contact and high energy particles, enabling efficient coating deposition without damaging heat-sensitive substrates or degrading organic precursors
2Use of energy by moving object
If inner electrode is positioned close to post-discharge area, then plasma energy utilization is improved, but electric arc formation with substrate occurs
Solution Approach 1:
The dielectric barrier serves as an intermediary that prevents direct electrical contact between the plasma generation zone and the substrate. It allows the inner electrode to be positioned close to the post-discharge area for efficient plasma energy utilization while blocking electric arc formation with the substrate through its insulating properties
3Object-affected harmful factors
If radial distance between electrodes is increased, then electric arc prevention is improved, but high voltage and current requirements increase
Solution Approach 1:
The dielectric barrier enables prevention of electric arcs between electrodes and substrate without requiring increased radial distance. This maintains compact electrode spacing and reduces power requirements while still preventing harmful electrical discharges through the insulating dielectric layer
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous, homogeneous, and efficient deposition of organic or inorganic thin films on conductive or non-conductive substrates, including heat-sensitive materials, by avoiding high energy plasma impacts and electric filaments, and allowing for complex surface coatings.
Implementation Method 1
the inner and outer electrodes are configured to be supplied with an electrical power source for producing a plasma when a plasma gas is supplied between the electrodes and is thereby excited
Implementation Method 2
at least one dielectric tubular wall extends axially between the inner electrode and the outer electrode
Data Source
AI summary
A post-discharge plasma coating device for a wired substrate comprising an inner tubular electrode on an inner tubular wall for receiving the substrate and a precursor moving axially in a working direction; an outer tubular electrode coaxial with, and surrounding, the inner tubular electrode. The inner and outer electrodes are configured to be supplied with an electrical power source for producing a plasma when a plasma gas is supplied between the electrodes and is thereby excited, the plasma excited gas flowing axially in the working direction and reacting with the precursor in a coating area at the end of the inner tubular wall in the direction. The inner tubular wall extends axially towards the coating area at least until, in various instances beyond, the end of the outer electrode, in the working direction and at least one dielectric tubular wall extends axially between the inner tubular electrode and the outer tubular electrode.