Cold Cathode Ionization Vacuum Gauge Auxiliary Discharge Starting Electrode
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional cold cathode ionization vacuum gauges face challenges with prolonged discharge initiation times and stability due to sputtered film contamination and dark currents, especially in high vacuum environments, where the complexity of auxiliary ignition systems and particle trapping lead to reduced photoelectron emission and discharge fluctuations.
Innovation Solution
A cold cathode ionization vacuum gauge design featuring a rod-shaped anode and cylindrical cathode with an auxiliary discharge starting electrode plate having a protruding portion that concentrates the electric field, allowing for efficient electron emission and rapid discharge initiation, while maintaining a floating potential to minimize dark currents and fluctuations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If auxiliary ignition devices (glow lamp or UV exposure lamp) are added to initiate discharge, then discharge initiation time is shortened, but device complexity increases due to separate means and circuits being required
Solution Approach 1:
The patent combines the auxiliary ignition function with the existing electrode structure by forming a protruding portion on the cathode that serves dual purposes: it maintains the cathode's electron emission function while simultaneously concentrating the electric field to initiate discharge. This eliminates the need for separate glow lamps or UV lamps, reducing device complexity while maintaining fast discharge initiation.
Solution Approach 2:
The protruding portion on the cathode performs multiple functions: it acts as part of the electron emission surface, concentrates the electric field for discharge initiation, and eliminates the need for separate ignition circuits. This multi-functional design resolves the contradiction by making the existing structure serve additional purposes without adding separate components.
2Reliability
If high voltage is applied to initiate discharge, then discharge can start, but time delay occurs between voltage application and discharge current flow
Solution Approach 1:
The patent applies local quality by creating a protruding portion on the cathode that concentrates the electric field at a specific location. This localized field concentration reduces the breakdown voltage at that point, enabling faster discharge initiation without requiring prolonged high voltage application across the entire electrode structure.
Solution Approach 2:
The protruding portion is pre-formed on the cathode to create a field concentration point before discharge is needed. This preliminary structural preparation ensures that when high voltage is applied, the electric field is already concentrated at the protruding portion, reducing the time delay for discharge initiation.
3Reliability
If cold cathode ionization vacuum gauge is used for high vacuum measurement, then high electron trapping efficiency is achieved, but wall surface sputtering occurs leading to chamber contamination
Solution Approach 1:
The patent extracts the discharge initiation function from the main electron emission process by using the protruding portion to concentrate the electric field and trigger discharge. This separation allows the main cathode surface to remain clean for electron emission while the protruding portion handles the high-energy discharge initiation, reducing sputtering on the chamber walls.
Solution Approach 2:
The protruding portion acts as an intermediary element that mediates between the high voltage application and the discharge process. It concentrates the electric field to initiate discharge with lower energy input, thereby reducing the sputtering effect on the chamber walls while still achieving reliable discharge initiation.
4Duration of action of stationary object
If sputtered film adheres to lamp surface during long term use, then photoelectron emission is hindered, but discharge initiation becomes difficult
Solution Approach 1:
The patent extracts the discharge initiation function from any separate lamp or UV source and integrates it into the electrode structure itself. The protruding portion on the cathode performs the discharge initiation function without requiring external lamps that would accumulate sputtered films, thereby maintaining long-term discharge initiation capability.
Solution Approach 2:
The protruding portion is designed as a simple, replaceable component that can be easily replaced if contaminated. Rather than using complex UV lamps that accumulate sputtered films, the protruding portion provides a simple discharge initiation mechanism that can be quickly replaced if needed, maintaining operational reliability over time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and stable discharge initiation even after long-term use, reducing complexity and preventing sputtered film interference, thus improving measurement accuracy and reliability in high vacuum conditions.
Implementation Method 1
a protruding portion 21 which is provided to the auxiliary discharge starting electrode plate 5 while being insulated therefrom, and which projects in the opening 22... configured so that, in voltage application to the anode 2 and the cathode 1, an electric field should be concentrated at the member to a larger extent than an electric field at the cathode is
Implementation Method 2
A cold cathode ionization vacuum gauge measures a gas pressure by initiating ionization of the gas through self discharge of an anode and a cathode
Implementation Method 3
the magnetron type and inverted magnetron type are suitable for high vacuum measurement because of their high electron trapping efficiencies as well as structures which allow stable sustained discharge
Data Source
AI summary
The present invention provides a cold cathode ionization vacuum gauge, an auxiliary discharge starting electrode plate, and a vacuum processing apparatus which have simple configurations and, even after long-term-use, which allow discharge to be initiated in a short-period of time and also to be performed stably after the start of the discharge. A cold cathode ionization vacuum gauge according to one embodiment of the present invention includes: an anode; a gauge head chamber (cathode) placed in such a manner as to form a discharge space together with the anode; and a protruding configured so that, in voltage-application to the anode and the cathode, an electric field should be concentrated at the protruding portion to a larger extent than an electric field at the gauge head chamber is. The protruding portion is provided inside the discharge space in such a manner that the protruding portion has a floating potential.