Vacuum Gauge Using Ionisation Effects TRIZ Cases
- Dual-Diaphragm Pressure Gauge for Wide-Range Vacuum Measurement
Two opposing diaphragms and a piezoelectric detector improve low-to-high vacuum measurement while reducing temperature and gas-species error.
- Compact Cold Cathode Vacuum Gauge for Thin-Film Deposition
A double-plasma cold cathode gauge measures residual vacuum near the substrate, improving leak detection and reducing gauge maintenance in thin-film lines.
- Vacuum Feedthrough Structure for Compact DBD Plasma Sensing
A layered optical-electrical vacuum feedthrough enables compact, durable DBD plasma sensors with stable discharge measurement across wide pressure ranges.
- Vacuum Pressure Sensing with Plasma Emission Ratio Detection
Plasma current becomes ambiguous at higher vacuum pressures, so this case adds two emission-line intensity signals for wider, precise sensing.
- Ionization Gauge Cartridge Structure to Suppress Electrode Deposition
A concave-convex through-hole structure in the gauge cartridge suppresses particle film buildup and maintains discharge inducing performance.
- Ionization Gauge Cartridge Structure for Stable Discharge Induction
A replaceable cartridge and wave passage boost photoelectron emission and sustain ionization gauge discharge despite electrode deposition.
- Cold Cathode Ionization Gauge Partition for Stable Discharge Start
A partitioned light-source layout introduces electromagnetic waves into the discharge space to stabilize startup and reduce cathode fouling.
- Overlapping Pressure Sensor Calibration for Broad-Range Accuracy
Simultaneous overlap-range readings calibrate a gas-dependent pressure sensor, extending accurate measurement across a broad pressure range.
- Overlapping Pressure Sensor Calibration for Gas-Independent Vacuum Measurement
Simultaneous readings from overlapping pressure sensors calibrate gas-dependent errors and extend accurate vacuum measurement range.
- Overlapping Pressure Sensors for Gas-Independent Vacuum Measurement
Overlapping indirect pressure sensors identify gas type from calibrated signals to correct gas dependence and derive a gas-independent pressure.
- Ionization Vacuum Gauge Using Carbon Nanotube Field Emission Cathode
A carbon nanotube field emission cathode replaces hot tungsten filaments in ionization vacuum gauges to enable stable electron generation.
- Ionization Gauge High-Pressure Operation via Dynamic Anode Voltage
Reducing anode grid voltage from 180V to 80V during high-pressure operation minimizes sputtering yields and extends gauge operational life.
- Ionization Gauge Leakage Current Detection and Decontamination
Electrical circuit detects leakage currents on feedthrough insulators to correct pressure signals and remove contamination without breaking vacuum.
- Integrated Pressure Sensor Merging Capacitive and Ionization Detection
A miniaturized pressure sensor merges capacitive diaphragm and ionization detection mechanisms into a single chip for wide-range measurement.
- Ionization Vacuum Measuring Cell Flake Retention
Magnetic materials in the measuring chamber retain flakes on pole disks, preventing short circuits and extending lifespan.
- Ionization Gauge Emission Current Control for Cathode Protection
Dynamic emission current control minimizes cathode sputtering and degradation while maintaining accurate pressure measurement across varying vacuum levels.
- Local Plasma Source for Vacuum Chamber Partial Pressure Mapping
A movable local plasma source generates emission spectra through a vacuum chamber window to measure partial pressure distribution.