Vacuum Gauge Using Ionisation Effects TRIZ Cases
- Dual-Diaphragm Pressure Gauge for Wide-Range Vacuum Measurement
Two opposing diaphragms and a piezoelectric detector improve low-to-high vacuum measurement while reducing temperature and gas-species error.
- Compact Cold Cathode Vacuum Gauge for Thin-Film Deposition
A double-plasma cold cathode gauge measures residual vacuum near the substrate, improving leak detection and reducing gauge maintenance in thin-film lines.
- Vacuum Feedthrough Structure for Compact DBD Plasma Sensing
A layered optical-electrical vacuum feedthrough enables compact, durable DBD plasma sensors with stable discharge measurement across wide pressure ranges.
- Vacuum Pressure Sensing with Plasma Emission Ratio Detection
Plasma current becomes ambiguous at higher vacuum pressures, so this case adds two emission-line intensity signals for wider, precise sensing.
- Ionization Gauge Cartridge Structure to Suppress Electrode Deposition
A concave-convex through-hole structure in the gauge cartridge suppresses particle film buildup and maintains discharge inducing performance.
- Ionization Gauge Cartridge Structure for Stable Discharge Induction
A replaceable cartridge and wave passage boost photoelectron emission and sustain ionization gauge discharge despite electrode deposition.