Ionization Pressure Gauge Bias Voltage Control

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Solution Overview

Problem

Hot cathode ionization vacuum pressure gauges face issues with servo control complexity and cost, coupled electron emission current and cathode bias voltage, leading to inaccurate and unreliable pressure measurements due to dead times and contamination-induced leakage currents.

Innovation Solution

A transistor circuit with low input impedance is used to independently control cathode bias voltage and electron emission current, along with a microcontroller for calibration and leakage current mitigation, allowing for continuous adjustability and accurate pressure measurement without dead times.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If servo control is used to maintain cathode bias voltage, then pressure measurement accuracy is improved, but device complexity and cost increase

Engineering Contradiction:
Improvepressure measurement accuracyVSAvoidservo circuit complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the cathode bias voltage control function from the traditional servo circuit and implements it through a dedicated voltage source circuit. This separation eliminates the need for complex servo control mechanisms while maintaining accurate voltage control, directly resolving the contradiction between measurement precision and device complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent segments the control system into independent functional modules: a voltage source circuit for cathode bias voltage control, a current source circuit for electron emission current control, and a microcontroller for coordination. This modular segmentation simplifies the overall device complexity while preserving measurement accuracy through dedicated control circuits

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If servo control is used to maintain cathode bias voltage, then pressure measurement accuracy is improved, but response time decreases due to dead time

Engineering Contradiction:
Improvepressure measurement accuracyVSAvoiddead time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent implements preliminary action by pre-establishing stable cathode bias voltage through the dedicated voltage source circuit before measurement begins. This eliminates the settling time required by traditional servo systems, as the voltage is already stabilized and ready for immediate accurate measurement, thus resolving the contradiction between precision and response time

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent ensures continuous useful action by maintaining constant cathode bias voltage through the dedicated voltage source circuit throughout the measurement process. This eliminates the intermittent dead time periods in servo-controlled systems, allowing continuous accurate pressure measurements without interruption, thereby resolving the contradiction between measurement precision and response time

Inventive Principle:
Principle #20Continuity of useful action

3Reliability

If electron emission current is increased to compensate for leakage currents, then measurement reliability is improved, but cathode lifetime decreases

Engineering Contradiction:
Improvemeasurement reliabilityVSAvoidcathode lifetime
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The patent introduces an intermediary leakage current compensation mechanism that measures and subtracts leakage current from the total measured current. This allows the system to maintain accurate pressure measurements using lower electron emission currents, thus preserving cathode lifetime while ensuring measurement reliability through mathematical compensation rather than increasing physical current

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies parameter changes by dynamically adjusting the electron emission current to optimal low levels while using software-based leakage current compensation algorithms. This changes the measurement approach from high-current physical compensation to low-current computational compensation, maintaining reliability while extending cathode lifetime

Inventive Principle:
Principle #35Parameter changes

4Device complexity

If electron emission current and cathode bias voltage are coupled in traditional design, then circuit simplicity is maintained, but measurement accuracy deteriorates during transient conditions

Engineering Contradiction:
Improvecircuit simplicityVSAvoidpressure measurement accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent segments the coupled voltage and current control into independent circuits: a voltage source circuit for cathode bias voltage and a current source circuit for electron emission current. This segmentation allows each parameter to be controlled independently without affecting the other, eliminating measurement inaccuracies during transients while maintaining overall circuit simplicity through modular design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent extracts the voltage control function from the current control circuit, creating a separate dedicated voltage source circuit. This separation eliminates the coupling that causes measurement errors during transient conditions, as voltage changes no longer affect current settings and vice versa, while maintaining simplicity through independent dedicated circuits

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution provides reliable, accurate, and continuous pressure measurements, extending gauge service life and reducing manufacturing costs by decoupling electron emission current and cathode bias voltage, while effectively mitigating leakage currents.

Implementation Method 1

The cathode is heated by current flow initiated by a voltage source to cause the electron emission

Methodology Applied
Scientific EffectThermionic emission: Thermionic Emission

Implementation Method 2

the electrons impact molecules and atoms of gas, constituting the atmosphere whose pressure is to be measured, and create ions

Methodology Applied
Scientific EffectIonization: Ionisation

Data Source

PatentEP3298374B1Ionization pressure gauge with bias voltage and emission current control and measurement
Publication Date: 2019.09.25 MKS INSTR INC
  • EP3298374B1 patent drawingFigure 1A~1B
  • EP3298374B1 patent drawingFigure 1C~2A
  • EP3298374B1 patent drawingFigure 2B

AI summary

Devices and corresponding methods are provided to operate a hot cathode ionization pressure gauge (HCIG). A transistor circuit can be configured to pass the electron emission current with low input impedance and to control cathode bias voltage. Emission current and cathode bias voltage can be controlled independently of each other, without a servo settling time. HCIGs can be calibrated with respect to leakage current.