Integrated Pressure Sensor Merging Capacitive and Ionization Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current pressure sensor devices are unable to measure a wide range of pressures from high vacuum to high pressure conditions with high precision, requiring multiple devices in parallel and complex systems, which increases cost, complexity, and reduces reliability, and lacks capability for self-calibration and miniaturization.
Innovation Solution
A miniaturized, integrated device with both electro-mechanical and ionization-based detection members, capable of measuring pressures from 10^-13 to 10^4 mbar, featuring a single chip design with electronic processing and interface means for self-calibration and diagnostics, and capable of detecting both total and partial pressures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple individual pressure sensor devices are used in parallel to cover a wide pressure range, then the measurement range is extended, but the device complexity increases
Solution Approach 1:
The patent combines multiple pressure sensing mechanisms (capacitive diaphragm sensor for higher pressures and ionization-based detection for lower pressures) into a single integrated device. The electronic processing means selectively activate the appropriate sensing mechanism based on the current pressure range, eliminating the need for multiple separate devices while maintaining a wide measurement range from 10^-13 to 10^4 mbar
Solution Approach 2:
The integrated pressure sensor device performs multiple functions within a single unit: it operates as a capacitive diaphragm sensor for pressures above 10^-4 mbar and switches to ionization-based detection for pressures at or below 10^-4 mbar. This multi-functionality allows one device to replace what would traditionally require multiple specialized sensors
2Adaptability or versatility
If multiple individual pressure sensor devices are used in parallel, then the measurement range is extended, but the cost increases
Solution Approach 1:
The patent integrates multiple sensing mechanisms and shared electronic processing components into a single device, reducing the total component count and manufacturing cost compared to using multiple separate devices. The shared electronic processing means handles signal processing for both sensing mechanisms, further reducing overall system cost
3Adaptability or versatility
If multiple individual pressure sensor devices are used in parallel, then the measurement range is extended, but the reliability decreases
Solution Approach 1:
The patent consolidates multiple sensing mechanisms into a single integrated device with unified electronic processing and control, reducing the number of connection points, calibration interfaces, and potential failure modes. This integration improves reliability by eliminating the need for parallel device coordination while maintaining wide-range measurement capability
4Measurement precision
If ionization-based detection is used for low pressure measurements, then the measurement precision is improved, but harmful factors are generated
Solution Approach 1:
The patent acknowledges the X-ray generation as an unavoidable byproduct of ionization-based detection but mitigates its harmful effects through strategic design: the ion detector is positioned and configured to detect ions while minimizing X-ray impact, and the system selectively activates ionization detection only when necessary for low-pressure measurements, converting a potentially harmful effect into an acceptable trade-off for achieving ultra-low pressure measurement capability
5Ease of operation
If macroscopic electronic components are used for each sensor device, then the device functionality is enabled, but the device dimensions increase
Solution Approach 1:
The patent integrates electronic processing means that handle signals from both capacitive and ionization-based sensing mechanisms within a single compact unit, reducing the overall device dimensions compared to having separate electronic processing modules for each sensing mechanism or device
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves high precision and reliability over an extremely wide pressure range, is self-contained for calibration and diagnostics, and improves signal-to-noise ratio, enabling effective measurement of pressures and gas concentrations.
Implementation Method 1
at least one first electro-mechanical miniaturized pressure sensor member (11), configured to detect a first pressure value (P1) and to generate a first electrical signal (S1)
Implementation Method 2
an ionization-based detection member (19)... configured to detect a second pressure value (P2)... comprising at least one ionization source (21)
Implementation Method 3
at least one ion detector (23)... configured to detect ions and generate... a second electrical signal (S2)
Data Source
Figure 1
Figure 2
Figure 3
AI summary
A miniaturized device 1 for pressure measurements over a very wide range is described. The device comprises at least one first electro-mechanical miniaturized sensor member 11, configured to detect a respective first pressure value P1 and generate a first electrical signal S1 representative of the first pressure value P1, and further comprises an ionization-based detection member 19, configured to detect a second pressure value P2, and generate a second electrical signal S2 depending on the amount of ions detected and representative of the second pressure value P2. The ionization-based detection member 19 comprises an ionization source 21, an ionization region 20, ion extraction means 22, and at least one ion detector 23, configured to detections. The device 1 further comprises electronic processing means 10, operatively connected to the first sensor member 11 and to the ionization-based detection member 19, and configured to determine a measured pressure value P based on the first S1 and second S2 detected electrical signals. The device 1 finally comprises interface means 15, operatively connected to the electronic processing means 10 and configured to provide in output the measured pressure value P. The first sensor member 11, the ionization-based detection member 19, the electronic processing means 10 and the interface means 15 are comprised in a single integrated device.