Spiral Screw Shield for Vacuum Cell Contamination

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Solution Overview

Problem

Vacuum measuring cells, particularly diaphragm cells, face contamination issues due to process gases and residual gases, leading to inaccurate measurements and drift behavior, which cannot be fully eliminated by cleaning, affecting precision and reproducibility.

Innovation Solution

A screw shield arrangement with spiral-form convolutions is implemented between the vacuum measuring cell and the process chamber, preventing direct through-view and forcing particles to interact multiple times with the shield before reaching the cell, thereby reducing contamination and enhancing the shield's protective effect.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of stationary object

If a flat shield is used to block direct particle paths, then service life is improved, but measurement precision deteriorates due to scattered particles reaching the diaphragm

Engineering Contradiction:
Improveservice lifeVSAvoidmeasurement precision
Core Design Contradiction:
Duration of action of stationary objectVSMeasurement precision

Solution Approach 1:

The patent applies a spiral-shaped shield instead of a flat shield. The spiral geometry creates multiple reflections and longer particle paths, effectively blocking scattered particles from reaching the diaphragm while maintaining protection. This curved/spiral configuration resolves the contradiction by improving both service life and measurement precision compared to flat shields.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The patent transitions from a two-dimensional flat shield to a three-dimensional spiral structure. This dimensional change allows the shield to block particles not only from direct paths but also from scattered trajectories, thereby improving measurement precision while maintaining the protective function for service life.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the diaphragm is made thinner to increase sensitivity, then measurement sensitivity is improved, but contamination impact worsens leading to more errors

Engineering Contradiction:
ImprovesensitivityVSAvoidcontamination impact
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The spiral shield acts as an intermediary between the process chamber and the diaphragm. It blocks contaminants before they can reach the thin diaphragm, thereby protecting the sensitive component while allowing the diaphragm to maintain its thin configuration for high sensitivity measurements.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The spiral geometry of the shield creates multiple interaction points for particles, increasing the likelihood that contaminants will be blocked or redirected away from the diaphragm. This enhances protection for the thin diaphragm while preserving measurement sensitivity.

Inventive Principle:
Principle #14Spheroidality (Curvature)

3Duration of action of stationary object

If a shield is added to protect the vacuum cell, then service life is improved, but device complexity increases

Engineering Contradiction:
Improveservice lifeVSAvoiddevice complexity
Core Design Contradiction:
Duration of action of stationary objectVSDevice complexity

Solution Approach 1:

The spiral shield provides enhanced protection compared to flat shields while maintaining a relatively simple single-component structure. The spiral geometry achieves superior particle blocking without requiring multiple shields or complex assemblies, thus improving service life with minimal increase in device complexity.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The screw shield significantly increases the service life of vacuum measuring cells by minimizing contamination, ensuring high precision and reproducibility of measurements while being economical and easy to clean.

Implementation Method 1

the shield 7 is to deploy its protective effect thereby that the undesirable gases or particles are condensed on the shield surface such that they do not reach into the vacuum cell

Methodology Applied
Scientific EffectCondensation: Condensation

Implementation Method 2

a gas throughflow between the outer diameter of the thread flank and the inner wall is inhibited and this throughflow is substantially forced into the spiral-form thread pitch

Methodology Applied
Scientific EffectSpiral flow:

Data Source

PatentUS7443169B2Shield arrangement for a vacuum cell
Publication Date: 2008.10.28 INFICON HLDG AG
  • US7443169B2 patent drawing
  • US7443169B2 patent drawing
  • US7443169B2 patent drawing

AI summary

A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.