Ionization Vacuum Cell Modular Chamber and Feedthrough Shielding

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Solution Overview

Problem

Ionization vacuum measuring cells face frequent shutdowns due to contamination of surfaces exposed to the ionization space, leading to inefficient operation and high maintenance costs, as existing technologies lack effective solutions for prolonged operation and contamination protection of electrically insulating and vacuum-tight feedthroughs.

Innovation Solution

The design incorporates a modular concept for the measuring chamber, allowing for easy replacement and a novel electrically insulating and vacuum-tight feedthrough using a ceramic and glass composite, which is shielded by a non-vacuum-tight feedthrough to prevent contamination, and a magnetization arrangement that minimizes stray magnetic fields.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If surfaces exposed to the ionization space are used, then ionization measurement function is achieved, but contamination occurs leading to frequent shutdowns for cleaning

Engineering Contradiction:
Improvecontinuous operation timeVSAvoidcontamination of surfaces
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The measuring chamber is divided into a replaceable module that can be separated from the housing. The first electrode with its cylindrical inner surface exposed to the ionization space is part of this replaceable measuring chamber module, allowing it to be replaced without replacing the entire device or the feedthrough structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The feedthrough structure is extracted from the replaceable measuring chamber module and made permanent in the housing. A non-vacuum-tight feedthrough protects the vacuum-tight feedthrough from contamination, while the vacuum-tight feedthrough remains isolated in the vacuum environment without being exposed to ionization space contaminants.

Inventive Principle:
Principle #2Taking out (Extraction)

2Reliability

If a vacuum-tight feedthrough is used for electrical supply, then vacuum sealing is maintained, but contamination of the feedthrough surfaces occurs

Engineering Contradiction:
Improvevacuum sealingVSAvoidcontamination of feedthrough
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A non-vacuum-tight feedthrough acts as an intermediary protective element between the ionization space contaminants and the vacuum-tight feedthrough. This intermediate structure shields the vacuum-tight feedthrough from contamination while maintaining vacuum sealing through the vacuum-tight feedthrough itself.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The vacuum-tight feedthrough is extracted from the replaceable measuring chamber module and made permanent in the housing. This separation ensures the feedthrough is not exposed to ionization space contaminants during normal operation, as it remains outside the replaceable module's exposure zone.

Inventive Principle:
Principle #2Taking out (Extraction)

3Loss of time

If the measuring chamber is made replaceable, then cleaning time is reduced, but device complexity increases

Engineering Contradiction:
Improvecleaning shutdown timeVSAvoidmodular structure
Core Design Contradiction:
Loss of timeVSDevice complexity

Solution Approach 1:

The measuring chamber is segmented as a separate replaceable module containing the first electrode and cylindrical inner surface. This segmentation allows the contaminated surfaces to be replaced by simply detaching and reattaching the module, significantly reducing cleaning time compared to disassembling the entire device.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The replaceable measuring chamber module is designed with universal connection interfaces to the housing, allowing quick attachment and detachment. The module serves multiple functions: containing the ionization space, providing the measurement surface, and enabling rapid replacement without affecting the permanent feedthrough structure.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach extends the operational time of ionization vacuum measuring cells, reduces maintenance costs, and maintains the effectiveness of the feedthroughs by shielding them from contamination, while also reducing stray magnetic fields and enhancing ionization efficiency.

Implementation Method 1

a both electrically insulating as well as vacuum-tight feedthrough for an electrical supply to one of the electrodes or for one of the electrodes itself, having an electrical insulator with respect to parts of the measuring cell, which are set at a different electrical potential than that of the fed-through supply or electrode

Methodology Applied
Scientific EffectElectrical insulation: Dielectric

Implementation Method 2

An ionization space is formed in the measuring chamber between these two electrodes, in which, upon application of a corresponding electrical potential difference between the electrodes, the gas is ionized

Methodology Applied
Scientific EffectGas ionization: Ionisation

Implementation Method 3

a magnetization arrangement that minimizes stray magnetic fields

Methodology Applied
Scientific EffectMagnetic field generation: Magnetic Field

Data Source

PatentUS9945749B2Ionization vacuum measuring cell
Publication Date: 2018.04.17 INFICON HLDG AG
  • US9945749B2 patent drawing
  • US9945749B2 patent drawing
  • US9945749B2 patent drawing

AI summary

An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).