Integrated Pressure Sensor with Ionization Gauge for Wide Range
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Solution Overview
Problem
Current pressure sensor devices are unable to measure pressures over a wide range, from high vacuum to very high pressure conditions, and lack the capability for simultaneous gas concentration analysis, requiring complex and costly systems with low reliability.
Innovation Solution
A miniaturized, integrated device with electro-mechanical and ionization-based detection members, along with controlled flow opening/closing means and electronic processing, allows for pressure measurement and gas concentration analysis across a wide range, self-calibration, and self-diagnostic capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple separate pressure sensor devices are used to cover a wide pressure range, then measurement capability over wide pressure range is improved, but device complexity increases
Solution Approach 1:
The patent combines multiple pressure sensing mechanisms (capacitive sensor for high pressure, ionization gauge for vacuum) into a single integrated device that can measure pressures from 10^-13 to 10^4 mbar. The device integrates different detection principles in one unit, eliminating the need for multiple separate devices and reducing system complexity while maintaining wide measurement capability.
Solution Approach 2:
The invention creates a universal pressure sensor that can operate across the entire pressure range from high vacuum to atmospheric pressure. The device performs multiple functions (pressure measurement, gas analysis, self-calibration) within a single unit, making it adaptable to various measurement conditions without requiring different specialized devices.
2Measurement precision
If capacitive diaphragm pressure sensors are used for high pressure measurements, then measurement precision is improved, but adaptability to vacuum conditions deteriorates
Solution Approach 1:
The patent divides the pressure measurement function into two specialized sensors: a capacitive diaphragm sensor optimized for high pressure measurements (1 to 10^4 mbar) and an ionization gauge optimized for vacuum measurements (10^-3 to 10^-13 mbar). Each sensor segment handles the pressure range where it performs best, and the system seamlessly switches between them based on the current pressure condition.
3Adaptability or versatility
If known vacuum gauges are used for low pressure measurements, then adaptability to vacuum conditions is improved, but measurement precision at very low pressures deteriorates
Solution Approach 1:
The patent extracts and eliminates the harmful X-ray generation mechanism from traditional ionization gauges by replacing the standard filament with a field-effect electron source. This removal of the X-ray generating component eliminates the spurious signals that occur at very low pressures (below 10^-10 mbar), thereby improving measurement precision in the ultra-high vacuum range while maintaining vacuum adaptability.
4Adaptability or versatility
If field-effect electron sources replace standard filaments in ionization gauges, then adaptability to different pressure ranges is improved, but harmful factors (X-ray generation) worsen
Solution Approach 1:
The patent converts the field-effect electron source's characteristics into a benefit by operating it at controlled current densities that prevent X-ray generation. The device utilizes the field-effect mechanism's ability to provide stable electron emission across different pressure ranges while operating parameters are optimized to avoid the harmful X-ray byproduct, turning a potential disadvantage into a controllable feature.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves high precision and reliability in measuring pressures from 10^-13 to 10^4 mbar, enabling universal pressure sensing and gas analysis while being self-contained and cost-effective.
Implementation Method 1
at least one first electro-mechanical miniaturized pressure sensor member (11), configured to detect a first pressure value (P1) and to generate a first electrical signal (S1)
Implementation Method 2
an ionization source (21), configured to emit electrons
Implementation Method 3
electrons, which ionize the gas particles that are present
Implementation Method 4
ion extraction means (22) configured to extract the generated ions from the ionization region (20)
Implementation Method 5
at least one ion detector (23), configured to detect ions and generate a second electrical signal (S2)
Implementation Method 6
controlled flow opening/closing means (90), which are configured to control a fluidic communication between the ionization-based detection member (19) and an environment in which the first sensor member (11) is located
Data Source
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AI summary
A miniaturized device 1 for pressure measurements over a very wide range and for gas concentration measurements is described. The device comprises at least one first electro-mechanical miniaturized sensor member 11 configured to detect a first pressure value P1 and generate a first electrical signal Si representative of the first pressure value P1, and further comprises an ionization-based detection member 19, configured to detect a second pressure value P2, and generate a second electrical signal S2 depending on the amount of ions detected and representative of the second pressure value P2. The ionization-based detection member 19 comprises an ionization source 21, an ionization region 20, ion extraction means 22 and at least one ion detector 23, configured to detect ions and generate the above-mentioned second electrical signal S2. The device 1 further comprises controlled flow opening/closing means 90, configured to control a fluidic communication between the ionization-based detection member 19 and an environment in which the first sensor member 11 is located. Also comprised in the device 1 are electronic processing means 10, operatively connected to said first sensor member 11 and to the ionization-based detection member 19, and configured to determine a measured pressure value P based on the first S1 and/or second S2 detected electrical signals. The electronic processing means 10 are further operatively connected to the controlled flow opening/closing means 90 and further configured to control the condition thereof. The device 1 finally comprises interface means 15, operatively connected to the electronic processing means 10 and configured to output the measured pressure value P. The first sensor member 11, the ionization-based detection member 19, the controlled flow opening/closing means 90, the electronic processing means 10 and the interface means 15 are comprised in a single integrated device.