Cold Cathode Ionization Vacuum Gauge Inner Wall Protection
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Solution Overview
Problem
Cold cathode ionization vacuum gauges face challenges in maintaining accurate pressure measurements due to the self-sputtering effect, which leads to insulative film formation on the inner wall, requiring regular maintenance and increasing the apparatus size to accommodate thicker spacers for protection, while smaller spacers result in backlash issues.
Innovation Solution
An elastically deformable electrode protection member with electric conductivity is placed within the discharge space to protect the inner wall, reducing the need for a large spacer and minimizing backlash by conforming to the inner wall shape and being electrically connected, thus preventing adhesion and maintaining a predetermined discharge space size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a thick tubular spacer is used to protect the inner wall from sputtering, then the protection effect is improved, but the discharge space size is reduced and the apparatus size must be increased
Solution Approach 1:
The patent applies this principle by using a thin-film coating (such as carbon film or other protective coatings) on the inner wall surface instead of a thick tubular spacer. This thin protective layer provides sufficient sputtering protection while occupying minimal space, thereby maintaining the discharge space size without requiring apparatus enlargement.
Solution Approach 2:
The patent changes the protective mechanism from mechanical spacing (physical barrier) to surface modification (coating layer). By applying protective coatings with specific material properties, the inner wall gains sputtering resistance without increasing the radial dimension, thus preserving the discharge space volume.
2Reliability
If a thick tubular spacer is used to protect the inner wall, then the protection effect is improved, but the apparatus size must be increased
Solution Approach 1:
By using thin-film protective coatings on the inner wall, the patent achieves effective sputtering protection without the need for thick spacers that would increase the overall apparatus dimensions. The coating layers are sufficiently thin that they do not significantly impact the external size of the gauge.
3Volume of stationary object
If a small spacer is used to maintain discharge space size, then the apparatus size is reduced, but backlash occurs and alignment becomes difficult
Solution Approach 1:
The thin-film coating approach eliminates the backlash issue entirely since there are no mechanical clearances or gaps between components. The coating is continuously applied to the inner wall surface, ensuring uniform protection without the alignment problems associated with mechanical spacers.
4Measurement precision
If regular maintenance is performed to remove insulative film, then measurement accuracy is maintained, but time and operational complexity increase
Solution Approach 1:
The patent applies preliminary anti-action by pre-coating the inner wall with protective materials (such as carbon film) that resist sputtering and prevent insulative film formation. This preventive approach eliminates or significantly reduces the need for regular maintenance to remove insulative films, as the protective coating continuously prevents the formation of harmful deposits.
Solution Approach 2:
The patent converts the harmful sputtering effect into a beneficial protective mechanism. By utilizing the sputtering process to deposit protective coatings (such as carbon) on the inner wall, the same plasma environment that causes damage is harnessed to create a protective layer that prevents insulative film formation and maintains measurement accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for a smaller apparatus size while effectively reducing adhesion and backlash, enhancing the reliability and accuracy of pressure measurements by ensuring a stable discharge space and easy alignment of the protection member.
Implementation Method 1
the electrode protection member is elastically deformed along a shape of an inner wall surface
Implementation Method 2
measures the pressure in a vacuum chamber constituting a vacuum processing apparatus by inducing ionization of gas through self-discharge between a anode and a cathode
Implementation Method 3
inducing ionization of gas through self-discharge between a anode and a cathode
Implementation Method 4
causes a self-sputtering effect during use and thereby produces an insulative film mainly containing the material of a gauge head container over the inner wall of this container
Data Source
AI summary
A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.