Common Lift Pin Assembly for Substrate and Shadow Ring Positioning
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Solution Overview
Problem
Separate lift mechanisms for substrates and shadow rings in substrate processing equipment are costly and occupy excessive space, complicating the design and operation of process chambers.
Innovation Solution
A lift apparatus utilizing a common actuator to raise or lower both substrate lift pin assemblies and shadow ring lift pin assemblies, integrated with bellows assemblies for vacuum sealing, allowing for simultaneous control of substrate and shadow ring positioning within the process chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If separate lift mechanisms are used for substrate and shadow ring, then each component can be independently controlled, but the device complexity and cost increase and space is crowded
Solution Approach 1:
The patent combines separate lift mechanisms for the substrate and shadow ring into a single integrated lift mechanism. The actuator is coupled to both the substrate lift pin assembly and the shadow ring lift pin assembly through a common lift assembly, merging two independent systems into one unified system that reduces complexity while maintaining control capability.
Solution Approach 2:
The single actuator serves multiple functions by controlling both the substrate lift pin assembly and the shadow ring lift pin assembly. This multi-functional design allows one component to perform the work of what would traditionally require two separate components, reducing overall system complexity and cost.
2Ease of operation
If separate lift mechanisms are used for substrate and shadow ring, then each component can be independently controlled, but the cost increases
Solution Approach 1:
The patent combines separate lift mechanisms for the substrate and shadow ring into a single integrated lift mechanism. The actuator is coupled to both the substrate lift pin assembly and the shadow ring lift pin assembly through a common lift assembly, merging two independent systems into one unified system that reduces complexity while maintaining control capability.
Solution Approach 2:
The single actuator serves multiple functions by controlling both the substrate lift pin assembly and the shadow ring lift pin assembly. This multi-functional design allows one component to perform the work of what would traditionally require two separate components, reducing overall system complexity and cost.
3Ease of operation
If separate lift mechanisms are used for substrate and shadow ring, then each component can be independently controlled, but the space below the pedestal is crowded
Solution Approach 1:
The patent combines separate lift mechanisms for the substrate and shadow ring into a single integrated lift mechanism. The actuator is coupled to both the substrate lift pin assembly and the shadow ring lift pin assembly through a common lift assembly, merging two independent systems into one unified system that reduces complexity while maintaining control capability.
Solution Approach 2:
The single actuator serves multiple functions by controlling both the substrate lift pin assembly and the shadow ring lift pin assembly. This multi-functional design allows one component to perform the work of what would traditionally require two separate components, reducing overall system complexity and cost.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces costs, simplifies the design, and optimizes space usage by using a single actuator to manage both substrate and shadow ring movements, enhancing operational efficiency and reducing the risk of arcing during processing.
Implementation Method 1
each of the first lift pin assemblies includes a first lift pin disposed on a first bellows assembly; a plurality of second lift pin assemblies arranged in a circle having a diameter greater than the given diameter and configured to raise or lower an annular chamber component, wherein each of the second lift pin assemblies includes a second lift pin disposed on a second bellows assembly
Data Source
AI summary
Embodiments of a lift apparatus for use in a substrate processing chamber are provided herein. In some embodiments, a lift apparatus includes: a plurality of first lift pin assemblies configured to raise or lower a substrate having a given diameter when disposed thereon, wherein each of the first lift pin assemblies includes a first lift pin disposed on a first bellows assembly; a plurality of second lift pin assemblies arranged in a circle having a diameter greater than the given diameter and configured to raise or lower an annular chamber component, wherein each of the second lift pin assemblies includes a second lift pin disposed on a second bellows assembly; an actuator; and a lift assembly coupled to the actuator and configured to raise or lower each of the first lift pin assemblies and the second lift pin assemblies by movement of the actuator.