Compact Reaction Gas Supply for Constant Concentration Control
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Solution Overview
Problem
Conventional gas suppliers for maintaining constant gas concentrations occupy a large volume, posing challenges in fabrication and acceptance convenience.
Innovation Solution
A process apparatus with a gas supplier that includes a reactor for converting a solid phase reactant to a reaction gas, a heater, a gas pump for applying pumping pressure, and a concentration measuring unit to control the pumping pressure, ensuring a constant concentration of the reaction gas is supplied, while minimizing the overall volume.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a gas cylinder type is used to supply gas with constant concentration, then the gas concentration stability is improved, but the volume occupied increases
Solution Approach 1:
The invention changes the physical state parameter of the reactant from gas phase (cylinder) to solid phase (pellet form), allowing compact storage while maintaining constant concentration supply through controlled vaporization. The solid reactant is heated to generate vapor at controlled rates, achieving both small volume and concentration stability.
Solution Approach 2:
The invention utilizes phase transition from solid to vapor phase. Solid reactant pellets are heated in a reaction chamber to generate vapor phase reactant gas. This phase transition enables compact solid storage with on-demand vapor generation, resolving the contradiction between small volume and constant concentration supply.
2Stability of the object's composition
If a gas pump is added to control pumping pressure for maintaining constant gas concentration, then the gas concentration stability is improved, but the device complexity increases
Solution Approach 1:
The system uses self-regulating mechanisms where the solid pellet vaporization naturally controls gas generation rate, and the gas pump operates automatically to maintain pressure. The design minimizes external control complexity by leveraging the inherent properties of solid-to-vapor transition and pressure-equalization mechanisms.
3Stability of the object's composition
If the pumping pressure is increased to maintain constant gas concentration, then the gas concentration stability is improved, but the energy consumption increases
Solution Approach 1:
The gas pump applies pumping pressure only when and where needed to maintain concentration stability, rather than continuously high pressure throughout the system. The pressure control is optimized to provide just sufficient force to maintain constant concentration, reducing unnecessary energy consumption while achieving the stability goal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively maintains a constant concentration of the reaction gas, reducing the volume required for the gas supplier and enhancing manufacturing and accommodation convenience, as demonstrated by the comparison with comparative examples where the gas pump significantly reduces the time to achieve and maintain constant gas concentrations.
Implementation Method 1
a heater which applies heat to the solid phase reactant to convert the solid phase reactant to a reaction gas in a gas phase
Implementation Method 2
a gas pump which applies a predetermined pumping pressure to the reactor
Data Source
AI summary
A process apparatus includes a gas supplier which supplies a reaction gas having a constant concentration, and a processor which performs a predetermined process by the reaction gas supplied from the gas supplier, where the gas supplier includes a reactor which accommodates a solid phase reactant, a heater which applies heat to the solid phase reactant to convert the solid phase reactant to a reaction gas in a gas phase, a gas pump which applies a predetermined pumping pressure to the reactor, and a gas outlet which discharges the reaction gas to the processor.