Composite Nozzle for Substrate Processing Apparatus
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Substrate processing apparatuses face issues with metallic corrosion and contamination due to the use of metallic components, static electricity causing electric discharges that damage substrates, and the need for a stronger nozzle arm that increases weight and leads to processing defects.
Innovation Solution
A nozzle design featuring a resin pipe with a metallic pipe covering its outer periphery, providing electrical conductivity to reduce static charges and prevent corrosion, while maintaining structural integrity without increasing the radial thickness of the nozzle arm.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a resin material is used for the processing liquid supply nozzle to prevent metallic corrosion and contamination, then chemical resistance is improved, but static electricity accumulates causing electric discharge that damages substrate circuits
Solution Approach 1:
The nozzle is constructed as a composite structure with a resin material core providing chemical resistance and a metallic coating layer providing electrical conductivity. This composite design allows the nozzle to simultaneously resist chemical corrosion from processing liquids and conduct away static electricity to prevent electric discharge damage to substrate circuits.
2Reliability
If the nozzle arm is made of resin to prevent corrosion, then chemical resistance is improved, but the structural strength decreases requiring larger radial thickness
Solution Approach 1:
The nozzle arm employs a composite construction where a resin material core provides chemical resistance to processing liquids while a metallic reinforcement layer or embedded metallic structure provides the necessary structural strength. This allows the arm to maintain strength without increasing radial thickness excessively.
Solution Approach 2:
The nozzle arm is divided into functional segments: an inner resin core for chemical resistance and an outer metallic reinforcement layer for structural strength. This segmentation allows each material to perform its optimal function without compromising the other.
3Strength
If the nozzle arm radial thickness is increased to ensure strength, then structural strength is improved, but the weight increases causing larger load on drive system
Solution Approach 1:
The nozzle arm uses a composite structure with a lightweight resin core and a thin metallic reinforcement layer. This provides the necessary structural strength without requiring excessive radial thickness, thereby minimizing weight increase and reducing the load on the drive system.
4Strength
If the nozzle arm surface area is increased to ensure strength, then structural strength is improved, but the amount of scattered processing liquid adhering to the nozzle arm increases causing processing defects
Solution Approach 1:
The nozzle arm's metallic outer layer may possess surface properties that reduce processing liquid adhesion compared to pure resin materials. The composite structure maintains necessary strength with minimized surface area while the metallic surface characteristics help reduce the amount of scattered processing liquid adhering to the arm.
5Ease of manufacture
If the nozzle arm is made of flexible resin material, then ease of manufacture is improved, but vibration occurs when processing liquid is discharged causing irregular supply
Solution Approach 1:
The nozzle arm combines a resin core that is easy to manufacture with a metallic reinforcement layer that provides rigidity and vibration resistance. This composite structure maintains manufacturing ease while eliminating the vibration problems associated with flexible pure resin materials during processing liquid discharge.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses electric discharges to the substrate, prevents corrosion, and ensures stable liquid delivery, reducing processing defects and maintaining the nozzle's strength and lightweight design.
Implementation Method 1
Since the metallic pipe 91 has electrical conductivity, the amount of charges of the processing liquid is reduced when the electrically charged processing liquid is introduced into the metallic pipe 91
Implementation Method 2
when the processing liquid flows through the inside of the processing liquid supply nozzle, a friction between the processing liquid and an inner surface of the processing liquid supply nozzle causes static electricity, and consequently the processing liquid becomes charged
Data Source
AI summary
A nozzle of a nozzle device includes an arm pipe that extends in a horizontal direction and a downstream pipe formed so as to curve downward from one end of the arm pipe. In the nozzle, a metallic pipe is provided inside a second resin pipe. Moreover, a first resin pipe is provided inside the metallic pipe. A boss is attached to the tip of the metallic pipe between the first resin pipe and the second resin pipe. At the tip of the nozzle, an outer peripheral surface of the first resin pipe, an end surface of the second resin pipe and an end surface of the boss are welded by welding resin. In this way, the metallic pipe is reliably coated with the first resin pipe, the second resin pipe, the boss and the welding resin.