Composite Seed Layer for Ni/Co Multilayer PMA

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Solution Overview

Problem

Current magnetic devices face challenges in achieving high perpendicular magnetic anisotropy (PMA) with materials like Ni/Co multilayers, requiring thick seed layers that are impractical due to space restrictions and performance degradation concerns, especially at elevated temperatures.

Innovation Solution

A composite seed layer configuration using Hf/NiCr, Hf/NiFeCr, NiFeCr/Hf, or NiCr/Hf is employed to induce a strong (111) crystal structure in the Ni/Co multilayer stack, ensuring high coercivity (Hc) and anisotropy field (Hk) with thermal stability up to 400°C, while maintaining a thickness compatible with device design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a thick seed layer is used to induce strong (111) crystal structure in Ni/Co multilayer, then perpendicular magnetic anisotropy is enhanced, but device space is excessive and performance degrades at elevated temperatures

Engineering Contradiction:
Improveperpendicular magnetic anisotropyVSAvoidseed layer thickness
Core Design Contradiction:
ReliabilityVSLength of stationary object

Solution Approach 1:

The seed layer is segmented into a composite structure with multiple layers (e.g., Ta/Ru/Cu or Ta/Ti/Cu) instead of using a single thick layer. Each layer contributes differently to inducing the (111) crystal structure while maintaining thermal stability and reducing overall thickness to fit device constraints.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses composite seed layer materials combining different metals (Ta, Ru, Cu, Ti) to achieve the desired (111) crystal structure induction. This composite approach allows optimization of both the crystal structure induction capability and thermal stability while reducing the total seed layer thickness compared to single-material seed layers.

Inventive Principle:
Principle #40Composite materials

2Length of stationary object

If seed layer thickness is reduced to meet device space restrictions, then device integration is improved, but perpendicular magnetic anisotropy induction capability is weakened

Engineering Contradiction:
Improveseed layer thicknessVSAvoidperpendicular magnetic anisotropy
Core Design Contradiction:
Length of stationary objectVSReliability

Solution Approach 1:

Different layers within the composite seed layer have different local compositions and properties optimized for specific functions. For example, Ta provides (111) texture, Ru provides diffusion barrier and structural stability, while Cu enhances magnetic properties. This local optimization allows thin overall thickness while maintaining strong PMA induction capability.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention optimizes the thickness parameters of each individual layer within the composite seed layer to achieve the desired balance. By carefully controlling the thickness of each component layer (e.g., Ta: 10-50nm, Ru: 1-10nm, Cu: 1-10nm), the seed layer induces strong (111) structure with sufficient PMA while meeting device space constraints.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If conventional seed layers are used, then manufacturing is simpler, but thermal stability above 300-400°C is insufficient

Engineering Contradiction:
Improveseed layer fabricationVSAvoidthermal stability
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The composite seed layer uses materials like Ta, Ru, and Cu that individually and collectively provide high thermal stability. Ta has high melting point and oxidation resistance, Ru provides structural stability at high temperatures, and Cu contributes to magnetic property stability. This composite structure maintains thermal stability above 300-400°C while remaining compatible with standard sputter deposition manufacturing processes.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances PMA properties, achieving higher Hc and Hk with improved thermal stability and compatibility, enabling more efficient magnetic switching and thermal stability in magnetic devices.

Implementation Method 1

a thin film made of a Ni/Co laminate or the like with a magnetization direction which is perpendicular to the plane of the film (perpendicular magnetic anisotropy or PMA)

Methodology Applied
Scientific EffectPerpendicular magnetic anisotropy: Anisotropy

Implementation Method 2

an improved seed layer that induces a strong (111) crystal structure in the Ni/Co multilayer stack

Methodology Applied
Scientific EffectEpitaxial growth: Epitaxy

Implementation Method 3

The tunnel barrier layer is thin enough that a current through it can be established by quantum mechanical tunneling of conduction electrons

Methodology Applied
Scientific EffectQuantum mechanical tunneling:

Implementation Method 4

Both MRAM and STT-MRAM may have a MTJ element based on a tunneling magneto-resistance (TMR) effect

Methodology Applied
Scientific EffectTunneling magneto-resistance: Magnetoresistance

Implementation Method 5

When a spin-polarized current transverses a magnetic multilayer in a CPP configuration, the spin angular moment of electrons incident on a ferromagnetic layer interacts with magnetic moments of the ferromagnetic layer near the interface between the ferromagnetic and non-magnetic spacer. Through this interaction, the electrons transfer a portion of their angular momentum to the ferromagnetic layer.

Methodology Applied
Scientific EffectSpin transfer torque:

Implementation Method 6

The spin-transfer effect arises from the spin dependent electron transport properties of ferromagnetic-spacer-ferromagnetic multilayers

Methodology Applied
Scientific EffectSpin-dependent electron transport:

Data Source

PatentEP2880665B1Co/ni multilayers with improved out-of plane anisotropy for magnetic device applications
Publication Date: 2019.12.25 HEADWAY TECHNOLOGIES INC
  • EP2880665B1 patent drawingFigure 1~3
  • EP2880665B1 patent drawingFigure 4~5
  • EP2880665B1 patent drawingFigure 6a~6b

AI summary

A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/X)n or (CoX)n composition where n is from 2 to 30, X is one of V, Rh, Ir, Os, Ru, Au, Cr, Mo, Cu, Ti, Re, Mg, or Si, and CoX is a disordered alloy. A CoFeB layer may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300°C and 400°C may be used to further enhance PMA in the laminated layer.