Composite Sensor Integrating Temperature and Humidity Measurement

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Solution Overview

Problem

Existing composite sensors cannot simultaneously measure temperature and humidity with high accuracy due to shared components and physical distance between sensors, leading to measurement inaccuracies and increased size requirements.

Innovation Solution

A composite sensor with an integral structure featuring a temperature-sensitive member and a moisture-sensitive member, sharing a common first terminal and having separate terminals for each sensor, allowing for simultaneous measurement of temperature and humidity with improved accuracy and reduced size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a composite sensor shares a common electrode between temperature and humidity sensors, then the device complexity is reduced, but measurement precision deteriorates because simultaneous measurement becomes impossible

Engineering Contradiction:
Improvestructure complexityVSAvoidmeasurement accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent divides the sensor into distinct temperature sensor and humidity sensor regions on the substrate, with separate electrode systems for each function. The temperature sensor uses a Pt layer with separate electrodes, while the humidity sensor uses a dielectric layer with its own electrode structure, allowing independent and simultaneous measurement of both parameters without interference.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If temperature and humidity sensors are disposed separately, then measurement precision is improved, but the area of the sensor increases

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidsensor area
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The patent combines the temperature sensor and humidity sensor into a single integrated device on one substrate. Both sensors share the same substrate and can be connected to a single terminal, reducing the overall sensor area while maintaining separate measurement capabilities through distinct electrode configurations and sensor material layers.

Inventive Principle:
Principle #5Merging (Combining)

3Measurement precision

If physical distance between sensors is reduced, then temperature and humidity correction accuracy is improved, but device complexity increases

Engineering Contradiction:
Improvecorrection accuracyVSAvoidintegration complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent designs a multi-functional substrate that serves both as the base for the temperature sensor and the humidity sensor. The substrate includes terminal structures that can serve common functions for both sensors, reducing the need for separate connection structures and minimizing device complexity while maintaining close physical proximity for accurate cross-parameter correction.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate simultaneous measurement of temperature and humidity, reduces sensor size, and minimizes mounting area compared to separate sensors, while correcting for temperature and humidity readings effectively.

Implementation Method 1

a temperature sensor that includes a temperature-sensitive member having resistivity changing in accordance with temperature

Methodology Applied
Scientific EffectResistivity change with temperature: Electrical Resistance

Implementation Method 2

a humidity sensor that includes a moisture-sensitive member having capacitance changing in accordance with humidity

Methodology Applied
Scientific EffectCapacitance change with humidity: Capacitance

Data Source

PatentEP3767285B1Compound sensor
Publication Date: 2025.01.08 MURATA MFG CO LTD
  • EP3767285B1 patent drawingFigure 1~3
  • EP3767285B1 patent drawingFigure 4~6
  • EP3767285B1 patent drawingFigure 7~8

AI summary

A composite sensor (1-1) is a composite sensor in which a temperature sensor unit (56) including a temperature-sensitive member and a humidity sensor unit (51) including a moisture-sensitive member are integrated. The composite sensor (1-1) is provided with: a first terminal (53) commonly used for the temperature sensor unit (56) and the humidity sensor unit (51); a second terminal (57) disposed to be able to measure an electrical characteristic of the temperature-sensitive member with the first terminal (53); and a third terminal (52) disposed to be able to measure an electrical characteristic of the moisture-sensitive member with the first terminal (53). With such a configuration, a composite sensor, which can simultaneously measure temperature and humidity and has improved accuracy, is provided.