Compound Helical Inductor for Plasma Processing
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Solution Overview
Problem
Traditional inductors used in plasma processing face issues such as signal loss, low breakdown voltage, and excessive inter-electrode capacitance, making them unsuitable for high-frequency, high-power applications.
Innovation Solution
A compound helical inductor coil with a primary and secondary coil configured as helices, separated by a dielectric insulator, allowing for efficient cooling, high voltage stand-off, and high current handling, and capable of operating as a T-coil, autotransformer, or L-reactor, with a high coupling coefficient without permeable materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If traditional inductors are used in plasma processing, then the structure is simple, but signal loss increases and breakdown voltage decreases
Solution Approach 1:
The inductor is divided into multiple separate coils (primary and secondary coils) with distinct functions. Each coil is independently wound and positioned, allowing optimization of each segment's properties to minimize overall signal loss while maintaining manageable structural complexity through modular design
Solution Approach 2:
The inductor employs composite construction combining copper coils for electrical conductivity with ceramic or fiberglass materials for structural support and electrical insulation. This composite approach reduces signal loss through optimized material properties while the structural materials help manage the overall device complexity
2Object-generated harmful factors
If traditional inductors are used, then the structure is simple, but inter-electrode capacitance becomes excessive
Solution Approach 1:
The harmful capacitive coupling between windings is extracted and minimized by increasing the physical separation between coils, using insulation barriers, and optimizing winding geometry. This removes the excessive inter-electrode capacitance while maintaining a relatively simple overall structure
Solution Approach 2:
Insulating materials such as ceramic spacers or fiberglass formers are introduced as intermediary elements between the conductive coils. These intermediaries reduce parasitic capacitance by providing electrical isolation and maintaining optimal spacing, thereby reducing harmful inter-electrode capacitance without significantly complicating the structure
3Temperature
If traditional inductors are used, then manufacturing is simple, but cooling efficiency is poor
Solution Approach 1:
The inductor design incorporates three-dimensional cooling channels and heat dissipation structures that extend in multiple spatial dimensions. This allows efficient heat removal through conduction paths and fluid flow channels, improving cooling efficiency while the modular 3D structure remains manufacturable using standard techniques
4Strength
If traditional inductors are used, then the structure is simple, but voltage stand-off capability is low
Solution Approach 1:
High-dielectric-strength materials such as ceramic insulators or high-quality fiberglass are used in the inductor construction. These composite materials provide superior voltage stand-off capability by withstanding high electric fields, while their structural integrity helps manage the overall device complexity through inherent mechanical strength
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compound helical inductor coil reduces voltage stress, increases bandwidth, and enables higher power operation by minimizing losses and inter-electrode capacitance, making it suitable for high-frequency, high-power applications.
Implementation Method 1
a dielectric insulator configured as a helix disposed between and separating the primary coil and the secondary coil
Implementation Method 2
The compound helical inductor coil includes a primary coil configured as a helix, and a secondary coil configured as a helix parallel with the primary coil
Data Source
AI summary
A high frequency, high voltage compound helical inductor coil includes a primary coil configured as a helix, a secondary coil configured as a helix and being surrounded by and parallel with the primary coil. A dielectric insulator, configured as a helix, is disposed between and separates the primary coil and the secondary coil. A center conductor may extend axially through the primary and secondary coils and may be attached at a first end to the primary coil and at a second end to the secondary coil.