Polishing Pad Conditioning Apparatus Foreign Material Blocking

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Solution Overview

Problem

In semiconductor manufacturing, CMP devices face issues with foreign materials entering the housing and causing damage to the rotary motor and uneven wear of the conditioning disk due to external forces.

Innovation Solution

A polishing pad conditioning apparatus with a pivot arm and head unit, featuring a rotary motor, a foreign material blocking member with a fluid flow groove to prevent foreign objects from entering the housing, and a deformation member with grooves to reduce deformation stress and wear on the conditioning disk.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the housing is open to allow access to the rotary motor and conditioning disk, then ease of operation and maintenance is improved, but foreign materials can enter the housing and cause damage

Engineering Contradiction:

Improveaccess to rotary motor and conditioning diskVSAvoidforeign material contamination

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

A blocking member is introduced as an intermediary component between the external environment and the housing interior. This blocking member includes a fluid flow groove that guides fluid to create a barrier preventing foreign materials from entering the housing while allowing the system to operate normally.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent utilizes fluid dynamics by creating a fluid flow groove on the blocking member. This groove guides fluid flow to generate pressure or flow patterns that actively prevent foreign materials from penetrating into the housing, using hydraulic principles to block contamination paths.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Stability of the object's composition

If the conditioning disk is rigidly fixed to reduce vibration, then stability is improved, but uneven wear and deformation stress increase

Engineering Contradiction:

Improvevibration reductionVSAvoiddeformation stress and wear resistance

Core Design Contradiction:

Stability of the object's compositionVSStrength

Solution Approach 1:

The conditioning disk is designed with a deformation member that allows controlled flexibility. Instead of being rigidly fixed, the disk can dynamically adjust its position and absorb deformation stresses through elastic deformation, reducing both vibration and uneven wear simultaneously.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent changes the mechanical parameters of the conditioning disk by introducing a deformation member with specific elastic properties. This allows the system to transition from a rigid configuration to one with controlled flexibility, optimizing the balance between vibration reduction and stress resistance.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If the blocking member completely seals the housing to prevent foreign material entry, then reliability is improved, but fluid flow and heat dissipation are restricted

Engineering Contradiction:

Improveprotection from foreign materialsVSAvoidfluid flow and heat dissipation

Core Design Contradiction:

ReliabilityVSUse of energy by moving object

Solution Approach 1:

The blocking member features a localized fluid flow groove rather than complete sealing. This local opening allows fluid to pass through for heat dissipation and cooling purposes, while the groove geometry and fluid dynamics create sufficient barrier effect to prevent foreign material entry in critical areas.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents foreign materials from entering the housing, reduces uneven wear and damage to the conditioning disk, ensuring optimal polishing surface maintenance and extending the apparatus's operational lifespan.

Implementation Method 1

a fluid flow groove configured to guide a movement of fluid for preventing foreign objects from entering the housing

Methodology Applied

Scientific EffectFluid flow:

Implementation Method 2

a deformation groove for reducing deformation stress induced by an external force to the conditioning disk

Methodology Applied

Scientific EffectStress reduction:

Data Source

PatentUS11648644B2Polishing pad conditioning apparatus

Publication Date: 2023.05.16 SAMSUNG ELECTRONICS CO LTD

AI summary

A polishing pad conditioning apparatus according to an example embodiment of the present inventive concept includes an apparatus body, a pivot arm provided on the apparatus body and including a housing having an internal space and provided at a distal end portion of the pivot arm and a head unit disposed at the distal end portion of the pivot arm. The head unit includes: a rotary motor provided in the internal space of the housing, the rotary motor including a rotary shaft; a foreign material blocking member connected to the rotary shaft; a disk holder connected to the rotary shaft; and a conditioning disk coupled to the disk holder. The foreign material blocking member includes a fluid flow groove configured to guide a movement of fluid for preventing foreign objects from entering the housing on an outer surface of the foreign material blocking member.