Conductive Dielectric Nanoparticle Layer for Substrate Bonding

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Solution Overview

Problem

The production of conductive multiple-substrate stacks faces challenges in maximizing electricity generation per unit area, achieving cost-effective mass production, ensuring long-term stability, and maintaining reliability under environmental influences, particularly at connection points.

Innovation Solution

A method involving the application of a dielectric layer with conductive nanoparticles onto semiconductor substrates, allowing for the formation of electrically conductive connections between substrates without precise alignment, utilizing fusion bonding technology and heat treatment to create a permanent bond, while enabling the substrates to operate across a wide wavelength spectrum.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If highly accurate alignment units are used to connect semiconductor substrates, then connection precision is improved, but device complexity and production cost increase

Engineering Contradiction:
Improveconnection precisionVSAvoidalignment plant complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent introduces a dielectric layer with conductive nanoparticles as an intermediary between semiconductor substrates. This layer serves as a mediator that enables electrical connection without requiring precise alignment, as the nanoparticles are distributed throughout the dielectric material, providing multiple potential contact points regardless of substrate positioning accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the physical state and distribution parameters of conductive elements by using nanoparticles dispersed in a dielectric layer rather than traditional aligned conductive structures. This parameter change allows for tolerance in alignment while maintaining electrical connectivity through the statistical distribution of multiple nanoparticle contact points.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If traditional alignment methods are used for substrate connection, then connection reliability is improved, but productivity decreases

Engineering Contradiction:
Improveconnection reliabilityVSAvoidproduction speed
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The dielectric layer with distributed conductive nanoparticles acts as a mediator that decouples the relationship between alignment accuracy and connection reliability. The intermediary structure provides redundant conductive pathways through multiple nanoparticles, ensuring reliable electrical connection even when substrates are not precisely aligned, thereby enabling faster production.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If conductive connections are made between substrates, then electrical conductivity is improved, but optical transparency deteriorates

Engineering Contradiction:
Improveelectrical conductivityVSAvoidoptical transparency
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The patent employs a composite material structure consisting of conductive nanoparticles embedded in a dielectric layer. This composite approach allows the system to exhibit both electrical conductivity (through the nanoparticle network) and optical transparency (through the dielectric matrix), as the nanoparticles are sufficiently small and sparsely distributed to be transparent to light while providing conductive pathways.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The conductive nanoparticles are locally distributed within the dielectric layer rather than forming continuous conductive structures. This local quality approach allows specific regions to provide electrical conductivity through nanoparticle clusters while maintaining overall optical transparency, as the dielectric material between nanoparticles remains transparent to light.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method eliminates the need for alignment plants, reduces production costs, and ensures stable and efficient electricity generation by creating a permanent bond with high conductivity and optical transparency, allowing for the connection of substrates with varying wavelength sensitivity.

Implementation Method 1

applying a dielectric layer, which is electrically conductive at least in certain sections, onto at least one substrate surface of at least one of the semiconductor substrates

Methodology Applied
Scientific EffectElectrical conduction through nanoparticles: Conduction (electrical)

Implementation Method 2

utilizing fusion bonding technology and heat treatment to create a permanent bond

Methodology Applied
Scientific EffectHeat treatment: Heat Treatment

Data Source

PatentUS10243094B2Method for producing a conductive multiple substrate stack
Publication Date: 2019.03.26 EV GRP E THALLNER GMBH
  • US10243094B2 patent drawing
  • US10243094B2 patent drawing
  • US10243094B2 patent drawing

AI summary

A method for producing a multiple-substrate stack from an, in particular wavelength-sensitive, semiconductor substrate and at least one further, in particular wavelength-sensitive, semiconductor substrate with the following steps: applying a dielectric layer, which is electrically conductive at least in certain sections, onto at least one substrate surface of at least one of the semiconductor substrates, and contacting the semiconductor substrate with the further semiconductor substrate and forming an electrically conductive connection between the semiconductor substrates.