Conductive DLD Pillar Array for Charge-Based Particle Separation

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Solution Overview

Problem

Existing periodic fluidic ratchet devices face limitations in size scaling due to increased fluidic resistance and practical fabrication issues, and they provide only single-dimensional size selectivity for particle separation.

Innovation Solution

The development of an electrically conductive deterministic lateral displacement (DLD) array device with a fluidic channel containing electrically conductive pillar components that generate an electrical field, enabling scalable fabrication using silicon lithography and providing a second separation dimension for particles based on electrical charges.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the pitch between pillar features is reduced to achieve smaller particle size selectivity, then the gap size decreases enabling separation of smaller particles, but fluidic resistance increases

Engineering Contradiction:
Improveparticle size selectivityVSAvoidfluidic resistance
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the purely mechanical size-based separation system with an electrophoretic system that uses electric fields to separate particles. The conductive pillars generate electric fields that exert forces on charged particles, enabling separation based on charge-to-size ratio rather than just size, thus reducing fluidic resistance while maintaining separation capability

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the separation mechanism from mechanical size-based filtering to electrophoretic charge-based separation. By applying voltage to the conductive pillars, the system creates electric fields that enable particle separation through electrophoresis, fundamentally changing the separation parameter from purely dimensional to electrokinetic

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If traditional non-conductive pillar arrays are used, then fabrication is simpler, but only single-dimensional size selectivity is achieved

Engineering Contradiction:
Improvefabrication simplicityVSAvoidseparation dimension
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent makes the pillar array multi-functional by rendering the pillars electrically conductive, enabling them to serve both as structural elements for size-based deterministic lateral displacement and as electrodes for generating electric fields. This allows the same structure to provide both size selectivity and charge-based electrophoretic separation

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the structural function of pillars with the electrical function of electrodes into a single integrated component. The conductive pillars simultaneously provide mechanical support for size-based separation and generate electric fields for charge-based separation, combining multiple functions into one element

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for the separation of particles with diameters as small as 20 nm and enhances resolution capacity by enabling separation based on both size and electrical charge, overcoming the limitations of existing devices.

Implementation Method 1

electrically conductive pillar components that can generate an electrical field to deflect particles of the fluid

Methodology Applied
Scientific EffectElectrophoresis: Electrophoresis

Implementation Method 2

enabling control sensing and separation of particles based on charge

Methodology Applied
Scientific EffectLorentz force: Lorentz Force

Data Source

PatentUS10685906B2Electrically conductive deterministic lateral displacement array in a semiconductor device
Publication Date: 2020.06.16 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US10685906B2 patent drawing
  • US10685906B2 patent drawing
  • US10685906B2 patent drawing

AI summary

Devices and methods that can facilitate electrically conductive deterministic lateral displacement (DLD) pillar array components are provided. According to an embodiment, a device can comprise a substrate that can have a channel that can comprise electrically conductive pillar components that can be coupled to one or more electrodes. The device can further comprise a seal layer that can be coupled to the substrate that seals the one or more electrodes.