Conductive Mask for Display Deposition Precision
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Solution Overview
Problem
Current mask technologies face challenges in achieving high process yield and reliability in display panel manufacturing, leading to increased costs and time, while also suffering from defects such as shadows during the deposition process.
Innovation Solution
A mask with a polymer film and conductive layers made of metals or metal oxides, specifically polyimide (PI) with nickel (Ni), gold (Au), titanium (Ti), or indium tin oxide (ITO), is designed to improve deposition precision by ensuring close contact between the mask and substrate, reducing shadow occurrences and enhancing manufacturing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional mask without conductive layer is used, then manufacturing cost is reduced, but deposition precision deteriorates due to shadow defects
Solution Approach 1:
The mask combines a polymer film (mask film) with a conductive layer to create a composite structure. The polymer film provides the masking function while the conductive layer eliminates shadow defects by enabling electrostatic induction, thus improving deposition precision without significantly increasing structural complexity
Solution Approach 2:
The conductive layer acts as an intermediary that enables electrostatic induction between the mask and substrate. This intermediary layer transfers electrostatic force to ensure close contact between the mask and substrate, preventing shadow defects and improving deposition precision
2Reliability
If mask manufacturing process is simplified to reduce cost and time, then productivity improves, but reliability deteriorates due to shadow defects in deposition
Solution Approach 1:
The invention changes the physical parameter of the mask by adding a conductive layer that enables electrostatic induction. This parameter change (adding conductivity) ensures close contact between mask and substrate, eliminating shadow defects and improving process yield and reliability without requiring complex manufacturing processes
3Manufacturing precision
If a mask without electrostatic induction capability is used, then device complexity is reduced, but deposition precision deteriorates due to poor contact with substrate
Solution Approach 1:
The conductive layer serves as an intermediary that enables electrostatic induction. It transfers electrostatic force from the substrate to the mask, ensuring reliable close contact between the two components and improving both deposition precision and contact reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed mask solution reduces manufacturing costs and time, improves deposition precision, and prevents defects like shadows, resulting in higher reliability and yield in display panel production.
Implementation Method 1
a conductive layer disposed on at least one surface of the mask film and including conductive metal or a conductive metal oxide
Data Source
AI summary
Provided is a mask having a plurality of cell areas, each of which has a plurality of through-portions defined therein. The mask includes a mask film including a polymer and a conductive layer disposed on at least one surface of the mask film and including conductive metal or a conductive metal oxide. Accordingly, precision of a deposition process is enhanced while reducing process time and costs in a manufacturing process of the mask, and thus the yield in manufacturing a display panel using the mask is improved. Therefore, the display panel manufactured using the mask may have improved reliability.