Conductive Trench Member Liquid Film Dust Collection
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Solution Overview
Problem
Current dust collection systems in micro processing environments, such as semiconductor and solar panel manufacturing, face inefficiencies in removing nano-sized particles due to their buoyancy and the limitations of HEPA and ULPA filters, leading to incomplete particle removal and structural complexities that hinder air flow control.
Innovation Solution
A dust collection apparatus featuring a conductive first member with a surface containing multiple trenches, connected between a liquid supplier and recoverer, which forms a thin liquid film to efficiently capture and remove particles by controlling the flow and turbulence of a conductive liquid, such as purified water, to prevent particle adherence and facilitate their removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If HEPA and ULPA filters are used to remove particles, then particle removal is achieved, but nano-sized particles cannot be completely removed due to their buoyancy and the filters have structural complexities that hinder air flow control
Solution Approach 1:
The patent replaces the mechanical filtration system (HEPA/ULPA filters) with a liquid film-based particle capture system. A conductive liquid is supplied to form a thin liquid film on a conductive member, which captures particles through liquid-particle interaction rather than mechanical filtration, thereby simplifying the structure and improving air flow control while maintaining particle removal efficiency including for nano-sized particles
Solution Approach 2:
The patent uses hydraulic principles by introducing a liquid film to capture particles. The liquid supplier supplies conductive liquid that forms a thin film on the conductive member surface, and the liquid recoverer collects the liquid after particle capture. This hydraulic approach replaces the pneumatic/m mechanical filter system, enabling effective particle removal without the structural complexities of traditional filters
2Reliability
If a liquid film is formed to capture particles, then particle capture efficiency is improved, but turbulence may occur affecting the stability of the liquid film
Solution Approach 1:
The patent optimizes parameters including the conductivity of the liquid (using conductive liquid with controlled electrical properties), the thickness of the liquid film (forming a thin but stable film), and the flow rate of the liquid. These parameter adjustments ensure the liquid film remains stable while maintaining high particle capture efficiency, preventing turbulence that would disrupt the film structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively removes nano-sized particles by forming a stable liquid film on the first member's surface, reducing turbulence and ensuring complete particle capture without requiring extensive mounting space, thus enhancing the efficiency and ease of integration into existing equipment.
Implementation Method 1
forming a thin liquid film to efficiently capture and remove particles
Implementation Method 2
capture and remove particles by controlling the flow and turbulence of a conductive liquid
Implementation Method 3
controlling the flow and turbulence of a conductive liquid, such as purified water
Data Source
AI summary
According to one embodiment, a dust collection apparatus includes a liquid supplier, a first member, and a liquid recoverer. One end of the first member is connected to the liquid supplier, one other end of the first member is connected to the liquid recoverer. The first member is conductive. The first member has a first surface including a plurality of trenches.