Consumable Storage Module With Integrated Alignment for Smaller Footprint
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Solution Overview
Problem
In substrate processing systems, the existing storage modules require a large footprint due to separate installations for storage units and alignment units, which hinders space efficiency in factory settings.
Innovation Solution
A storage module with a substrate support, a sensor for detecting consumable member orientation, a rotating unit for aligning the consumable member, a storage unit for storing the consumable member, and an elevating unit for vertical movement, allowing for integrated alignment and storage with reduced footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If separate storage unit and alignment unit are installed, then alignment function is provided, but footprint area increases
Solution Approach 1:
The patent combines the storage unit and alignment unit into a single integrated storage module. The consumable member is stored in the storage unit and aligned on the substrate support within the same module, eliminating the need for separate alignment units and reducing footprint area while maintaining both storage and alignment functions.
Solution Approach 2:
The storage module serves multiple functions: it stores consumable members in the storage unit and performs alignment operations on the substrate support. This multi-functional design allows a single device to replace what would traditionally require separate storage and alignment equipment, reducing overall system footprint.
2Productivity
If manual replacement is used, then operation simplicity is maintained, but productivity decreases
Solution Approach 1:
The storage module enables automated self-service operation where the consumable member is automatically transferred from the storage unit to the substrate support and aligned without manual intervention. The sensor detects orientation and the rotating unit performs alignment automatically, improving productivity while maintaining ease of operation through automated processes.
3Measurement precision
If alignment unit is added, then alignment precision is improved, but device complexity increases
Solution Approach 1:
The alignment function is merged into the storage module, with the sensor and rotating unit integrated alongside the storage unit. This integration provides precise alignment capability through sensor-based detection and automated rotation while avoiding the complexity of a separate standalone alignment unit.
Data Source
AI summary
A storage module includes a substrate support, a sensor, a rotating unit, a storage unit and an elevating unit. The substrate support has a consumable member thereon. The sensor detects an orientation of the consumable member. The rotating unit rotates the consumable member in a predetermined direction based on the orientation of the consumable member detected by the sensor. The storage unit is disposed below the substrate support to store the consumable member. The elevating unit vertically moves the storage unit.