Contact Electroplating Isolated Structures via Mesh Electrodes

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Solution Overview

Problem

Current electroplating methods for flexible electronics and IC processing face challenges such as inferior conductivity, complex processes, and difficulty in achieving uniform electrical contact to isolated or nano-scale structures, leading to inefficient metal deposition and structural limitations in high-density flexible electronics and IC fabrication.

Innovation Solution

An electroplating apparatus comprising a working electrode and counter electrode made from fine metal mesh or metal fiber cloth, with a chemically inert porous material in between, allowing direct contact and simultaneous electrical connection to substrates, enabling uniform metal deposition across large areas and eliminating the need for peripheral contacts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional electroplating methods are used for isolated structures, then peripheral contact is required, but uniform electrical contact to all structures cannot be achieved

Engineering Contradiction:
Improveuniformity of electrical contactVSAvoidcomplexity of contact configuration
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent divides the substrate into multiple isolated structures (trenches, posts, or holes) that are independently plated. Each structure receives electrical contact through the electrolyte solution rather than through a continuous peripheral contact system, enabling uniform plating across all structures regardless of their position or size.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces an electrolyte solution as an intermediary medium that provides electrical contact to all isolated structures. The electrolyte acts as a conductor that bridges the power supply to each individual structure, eliminating the need for direct physical contact with each structure while ensuring uniform electrical connection.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If seed layers are used to enable electroplating, then electrical contact is improved, but the seed layer thickness must be increased for large area substrates

Engineering Contradiction:
Improveelectrical contact capabilityVSAvoidseed layer thickness
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The patent uses the electrolyte solution (hydraulic medium) to deliver electrical current to the substrate structures. The electrolyte flows through the plating solution and provides the necessary electrical contact through ionic conduction, eliminating the need for thick seed layers that would be required to conduct the same current through electronic conduction alone.

Inventive Principle:
Principle #29Pneumatics and hydraulics

3Reliability

If metal pastes are used for flexible electronics, then conductivity is improved, but the process becomes complex and time-consuming

Engineering Contradiction:
ImproveconductivityVSAvoidprocess speed
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent replaces the mechanical printing process (screen printing or inkjet printing of metal pastes) with an electrochemical process (electroplating). Instead of mechanically depositing paste materials that require drying and sintering, the system uses electrical current to directly deposit pure metal onto the substrate, eliminating multiple process steps and significantly reducing production time.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fundamental parameter of metal deposition from physical/chemical paste application to electrochemical metal ion reduction. By changing from paste deposition (requiring solvents, drying, and sintering) to direct electroplating (using metal salts and electrical current), the process achieves superior conductivity with fewer steps and faster cycle times.

Inventive Principle:
Principle #35Parameter changes

4Ease of operation

If electroless plating is used, then direct control is reduced, but the process is spontaneous and hard to control

Engineering Contradiction:
Improvecontrol capabilityVSAvoiddeposit quality
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The patent uses periodic or pulsed electrical current to control the electroplating process. By applying current in controlled pulses rather than continuous flow, the system maintains precise control over metal deposition while preventing unwanted side reactions and ensuring uniform deposit quality across all substrate structures.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for efficient and uniform electroplating of pure metals onto substrates with high resistance seed layers, enhancing conductivity and simplifying the process of trench filling in IC devices, while enabling surface finishing of isolated electronic devices with desired metals like nickel, gold, and silver.

Implementation Method 1

apparatus and method of electroplating metals by direct contact onto isolated or weekly connected structures

Methodology Applied
Scientific EffectElectroplating: Electroplating

Implementation Method 2

electroplating of pure metals onto substrates with high resistance seed layers

Methodology Applied
Scientific EffectElectrochemical reduction: Electrolysis

Data Source

PatentUS10480092B2Apparatus and method of contact electroplating of isolated structures
Publication Date: 2019.11.19 ECSI FIBROTOOLS INC
  • US10480092B2 patent drawing
  • US10480092B2 patent drawing
  • US10480092B2 patent drawing

AI summary

The presently disclosed apparatus and method offer the capability to electroplate pure metals or alloys onto substrates, having no current collectors or being connected to the power supply by a low conductivity seed layer. Thus, the disclosed system enables pure metal or alloy deposition on various substrates, including flexible electronic circuits, wafers for IC processing, and discrete electronic devices in surface finishing applications.