Contactless Micro-Light-Emitting Element Inspection With Electron Beams
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Solution Overview
Problem
There is a lack of commercially available apparatus for inspecting micro-light-emitting elements in a contactless manner, which is crucial for accurately identifying defective elements in large-scale production.
Innovation Solution
An inspection apparatus comprising a stage for micro-light-emitting elements, an electron beam emitting unit, an electron beam guide unit, and an optical detection unit, which uses electron beams to emit light from the elements and measures their images to determine defects, with a filter to selectively transmit specific wavelengths and a control unit for analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If contactless inspection method is used, then inspection rate increases and damage is prevented, but no commercially available apparatus exists
Solution Approach 1:
The inspection apparatus is divided into distinct functional modules: electron beam generating unit, electron beam guide unit, light emission unit, and optical detection unit. Each module performs a specific function, allowing for modular design and manufacturing while achieving contactless inspection of multiple micro-light-emitting elements simultaneously, thereby increasing inspection rate without excessive complexity
Solution Approach 2:
Electron beams serve as an intermediary between the inspection apparatus and the micro-light-emitting elements. The electron beams contactlessly excite the elements to emit light, which is then detected by the optical detection unit. This intermediary approach enables contactless inspection while maintaining high inspection rates
2Measurement precision
If electron beam guide unit is added, then beam control is improved, but device structure becomes more complex
Solution Approach 1:
The electron beam guide unit acts as an intermediary structure between the electron beam generating unit and the micro-light-emitting elements. It includes through-holes that selectively guide electron beams to specific elements, providing precise beam control while maintaining a relatively simple mesh-like structure that does not excessively increase device complexity
Solution Approach 2:
The electron beam guide unit features through-holes with specific patterns that provide localized beam control. Different regions of the guide unit can be designed with different hole patterns to control electron beam distribution precisely, achieving high measurement precision without requiring the entire structure to be complex
3Productivity
If multiple micro-light-emitting elements are inspected simultaneously, then productivity increases, but measurement precision may decrease
Solution Approach 1:
The optical detection unit is designed to detect light from multiple micro-light-emitting elements simultaneously while maintaining individual measurement precision. The detection system can resolve and distinguish light signals from each element, allowing parallel inspection without sacrificing defect detection accuracy
Solution Approach 2:
The apparatus enables continuous simultaneous inspection of multiple elements through contactless electron beam excitation and optical detection. This continuous parallel measurement maintains high productivity while preserving measurement precision through the inherent capabilities of the electron beam and optical detection systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables contactless inspection of micro-light-emitting elements, increasing the inspection rate and preventing damage, thereby improving the yield of defect-free elements.
Implementation Method 1
an electron beam emitting unit configured to emit electron beams to the plurality of micro-light-emitting elements
Implementation Method 2
an optical detection unit configured to acquire an image of light emitted from the plurality of micro-light-emitting elements
Data Source
AI summary
An embodiment discloses an inspection apparatus and an inspection method, the inspection apparatus including a stage on which a plurality of micro-light-emitting elements is disposed, an electron beam emitting unit configured to emit electron beams to the plurality of micro-light-emitting elements, an optical detection unit configured to measure light emitted from the plurality of micro-light-emitting elements, and an electron beam guide unit disposed between the electron beam emitting unit and the plurality of micro-light-emitting elements.