Contactor Board Assembly for Full-Wafer IC Testing
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Solution Overview
Problem
Full-wafer testing poses challenges due to the large number of contacts on a wafer, requiring numerous power, ground, and signal connections, which complicates the testing process.
Innovation Solution
A method and apparatus for testing integrated circuits on a wafer, involving a contactor board assembly that moves relative to a holder to make contact with the wafer contacts, and an actuator system that adjusts pressure and cross-sectional area to ensure proper contact and signal transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If full-wafer testing is performed with a large number of contacts, then testing coverage and defect identification capability are improved, but the complexity of making power, ground, and signal connections increases significantly
Solution Approach 1:
The patent introduces a contactor board assembly as an intermediary component between the wafer contacts and the testing system. This contactor board consolidates multiple individual connection paths into a unified interface, simplifying the complexity of managing numerous power, ground, and signal connections while maintaining full-wafer testing capability.
Solution Approach 2:
The patent merges multiple separate connection functions (power, ground, signal) into an integrated contactor board assembly. By combining these functions into a single modular unit that interfaces with the wafer, the system reduces the operational complexity of establishing numerous individual connections while preserving comprehensive testing coverage.
2Reliability
If the contactor board assembly is moved relative to the holder to ensure proper contact, then contact reliability is improved, but the mechanical complexity of the actuator system increases
Solution Approach 1:
The actuator system is designed to automatically adjust and maintain optimal contact between the contactor board assembly and the wafer holder. The system includes self-regulating mechanisms that respond to contact conditions, reducing the need for complex external control systems while ensuring reliable electrical contact throughout the testing process.
Solution Approach 2:
The contactor board assembly incorporates dynamic positioning capabilities through the actuator system, allowing real-time adjustment of contact pressure and alignment. This dynamic adaptation ensures maintained contact reliability during testing operations, accommodating variations in wafer positioning and contactor wear without requiring complete system redesign.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables efficient full-wafer testing by ensuring reliable contact and signal transmission across a large number of contacts, facilitating early-stage defect identification and improving testing accuracy.
Implementation Method 1
modifying a pressure of the volume and moving the piston relative to the cylinder
Implementation Method 2
adjusting the force of at least one spring that connects the piston to the cylinder to level the piston relative to the device
Data Source
AI summary
A cartridge, including a cartridge frame, formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame, a contactor support structure, a contactor interface on the contactor support structure, a plurality of terminals, held by the contactor support structure, for contacting contacts on a device, and a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.