Container Changing System Vertical Lifting Mechanism
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Solution Overview
Problem
The existing container changing systems in semiconductor manufacturing facilities lead to a deterioration in the working rate of substrate processing apparatuses and a reduction in semiconductor device production due to the time-consuming conveyance of FOUPs between substrate processing apparatuses and stockers, and increasing FOUP stages results in a larger footprint, limiting the number of apparatuses that can be arranged in a clean room.
Innovation Solution
A container changing system with a carrier and holder configuration that allows for the mounting and lifting of containers between multiple mounting portions along a rail, enabling efficient container swapping without the need for conveyance between substrate processing apparatuses and stockers, thereby preventing working rate deterioration and maintaining production levels without increasing the number of mounting portions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If FOUPs are conveyed between substrate processing apparatus and stocker using conventional FOUP conveying unit, then container replacement is achieved, but working rate deteriorates due to time-consuming conveyance
Solution Approach 1:
The system divides the container replacement process into two independent parts: (1) the FOUP conveying unit that moves FOUPs horizontally between apparatus and stocker, and (2) the newly added container lifting unit that vertically lifts FOUPs into the apparatus. This segmentation allows simultaneous operation of both units, enabling container replacement without waiting for conveyance to complete, thus improving working rate while maintaining necessary conveyance time.
Solution Approach 2:
The container lifting unit is positioned and ready in advance within the substrate processing apparatus. When a FOUP arrives at the apparatus via the conveying unit, the lifting unit can immediately engage and lift the FOUP into position without waiting for the conveyance to fully complete. This preliminary positioning and readiness of the lifting mechanism eliminates idle time and maintains continuous processing.
2Productivity
If FOUP stages are increased to enable container changes without conveyance, then working rate is maintained, but footprint increases limiting number of apparatuses
Solution Approach 1:
Instead of adding more FOUP stages horizontally (which would increase footprint and limit the number of apparatuses that can be arranged), the invention introduces a vertical lifting dimension. The container lifting unit operates in the vertical direction to move FOUPs into the apparatus, replacing the need for multiple horizontal stages. This dimensional change maintains high working rate while minimizing floor space requirements, allowing more apparatuses to be arranged in the clean room.
3Productivity
If container lifting unit is added between carrier and first mounting portion, then container changing efficiency is improved, but device complexity increases
Solution Approach 1:
The container lifting unit is designed with multi-functionality to justify its addition: it can lift different types of containers (FOUPs or BOPs), work with both carrier-based and stage-based mounting portions, and integrate with the existing conveying unit control system. This universal design reduces the need for separate specialized mechanisms for different container types or mounting configurations, thereby limiting the increase in overall system complexity while maintaining improved container changing efficiency.
Data Source
AI summary
A container changing system able to prevent deterioration in the working rate of substrate processing apparatuses and deterioration in the amount of production of semiconductor devices. A second mounting portion is arranged between a carrier of a container conveying unit and a first mounting portion of a substrate processing apparatus with respect to a lifting direction of a container. The second mounting portion is configured to freely advance and withdraw to/from a lifting path of the container. A container lifting unit is arranged between the carrier and the second mounting portion with respect to the lifting direction. In the container lifting unit, a base portion is configured to freely advance and withdraw to/from the lifting path, a second holder is provided below the base portion and can hold the container, and a second lifter is arranged between the base portion and the second holder and configured to lift up/down the second holder between the base portion and the first mounting portion when the second holder is located opposed to the first mounting portion.