Conveyance Hand Elastic Member for Substrate Warpage
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Solution Overview
Problem
Conveyance hands struggle to maintain high positioning accuracy when handling substrates with complex warpage, as existing elastic members either lack sufficient deformation in specific directions or compromise rigidity, leading to inadequate suction and positioning issues.
Innovation Solution
A conveyance hand with a base, suction pad, and a first elastic member featuring three or more support units, where the rigidity in the vertical direction is lower than in the horizontal direction, allowing the suction pad to conform to the substrate's shape, supported by a leaf spring and O ring for flexible deformation and airtightness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If the rigidity of the elastic member is lowered to increase deformation amount in a specific direction, then the pad can conform better to the substrate shape, but the rigidity in the conveyance direction decreases, compromising positioning accuracy
Solution Approach 1:
The elastic member is designed with non-uniform thickness, where the thickness varies in different regions to provide different rigidity characteristics. Specifically, the thickness is greater in regions requiring higher rigidity for positioning accuracy and thinner in regions needing greater deformation for pad conformity, achieving both requirements simultaneously through localized property variation.
Solution Approach 2:
The invention changes the physical parameter of the elastic member by varying its thickness distribution. This parameter change allows the elastic member to exhibit direction-dependent rigidity characteristics, enabling it to provide both sufficient deformation for pad conformity and adequate rigidity for maintaining positioning accuracy during substrate conveyance.
2Manufacturing precision
If the elastic member has high rigidity to maintain positioning accuracy, then the pad can hold the substrate securely, but the pad cannot deform sufficiently to match complex warpage shapes
Solution Approach 1:
The elastic member incorporates spatially varying thickness to create local quality differences. Thinner regions allow greater deformation for matching complex warpage, while thicker regions maintain rigidity for positioning accuracy. This local quality variation enables the single elastic member to simultaneously satisfy both conforming and positioning requirements.
Solution Approach 2:
The elastic member can be constructed as a composite structure with regions of different material properties or thicknesses, allowing it to exhibit both flexible and rigid characteristics in different areas. This composite approach enables the pad to deform over complex substrate shapes while maintaining overall structural integrity and positioning precision.
3Device complexity
If a single-direction elastic member is used, then the structure is simple, but it cannot provide sufficient deformation in multiple directions for complex warpage
Solution Approach 1:
Instead of using multiple elastic members or complex mechanisms, the invention achieves multi-directional deformation capability through local quality variation in a single elastic member. The non-uniform thickness distribution allows the member to deform appropriately in different directions according to the local requirements of the substrate warpage, maintaining structural simplicity while achieving complex conforming behavior.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the conveyance hand to maintain high positioning accuracy and effective suction on substrates with complex warpage, ensuring reliable handling and reduced risk of damage during transfer.
Implementation Method 1
the conveyed object is suctioned (held) by a conveyance hand having a suction pad
Implementation Method 2
a conveyance hand in which a suction pad is supported by an elastic member, and while the suction surface of the suction pad is caused to assume the shape of the surface of the conveyed object
Data Source
AI summary
A conveyance hand for holding a conveyed object can include a base, a pad configured to suction the conveyed object, and a first support member fixed to the base and configured to support the pad. First support member can include three or more support members each configured to support the pad.