Coolant Path Design for Plasma Etching Temperature Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In plasma etching processes, maintaining uniform temperature and pressure of a processing target object is challenging due to limitations in heat transfer efficiency, particularly in direct expansion type temperature control systems where coolant vaporization is critical for high-efficiency heat transfer.
Innovation Solution
A processing apparatus with a dual-structured coolant path within the mounting table, featuring a first and second path with regular cross-sectional areas and spiral extensions, along with airtightly divided heat transfer spaces, allows for precise control of pressure and heat generation, enhancing both heat transfer efficiency and pressure uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single-plane coolant path is used in the mounting table, then the structure is simple, but pressure uniformity deteriorates due to required inlet/outlet arrangements and folding portions
Solution Approach 1:
The coolant path is configured to extend in the vertical direction (third dimension) rather than being confined to a single horizontal plane. The first coolant path extends from the center toward the radial direction, and the second coolant path extends from the first path in the vertical direction, creating a three-dimensional coolant distribution network that eliminates the need for excessive folding and maintains pressure uniformity.
Solution Approach 2:
The coolant path is divided into multiple independent segments (first coolant path and second coolant path) that are distributed throughout the mounting table volume. This segmentation allows each path to independently contribute to pressure uniformity while collectively providing comprehensive coolant distribution without requiring complex single-plane arrangements.
2Power
If the coolant path length and cross-sectional area are increased to improve heat generation, then heat transfer efficiency improves, but the internal volume of the mounting table is exceeded
Solution Approach 1:
The coolant path utilizes the vertical dimension within the mounting table to extend its length and cross-sectional area without increasing the horizontal footprint. By arranging paths in three dimensions rather than confining them to a single plane, the system achieves greater heat generation capacity while maintaining compact dimensions.
Solution Approach 2:
The second coolant path is positioned to extend from the first coolant path, creating a nested or hierarchical arrangement where paths are distributed through different vertical levels. This nesting allows maximum utilization of the available internal volume for heat generation purposes.
3Ease of operation
If folding portions are added to the coolant path to arrange inlet and outlet in one plane, then ease of operation improves, but pressure variation increases
Solution Approach 1:
Instead of folding the coolant path within a single plane to accommodate inlet and outlet arrangements, the system uses vertical extension to position inlet and outlet ports at different heights. This three-dimensional arrangement eliminates the need for folding portions that would create pressure variations, while still providing convenient access points for coolant supply and discharge.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves higher heat generation and pressure uniformity, reducing the need for inlet and outlet arrangements within a single plane, thereby minimizing pressure variations and optimizing vaporization temperature uniformity, even within limited internal volumes.
Implementation Method 1
it is required to control a pressure and a dryness of a coolant flowing in a path within a mounting table configured to mount thereon the processing target object, which serves as a vaporizer
Implementation Method 2
there is proposed a direct expansion type temperature control system configured to be capable of performing a high-efficiency heat transfer
Implementation Method 3
an electrostatic chuck provided on the first portion
Data Source
AI summary
A cooling table includes a first portion, a second portion, a first path, a second path and a third path. An electrostatic chuck is provided on the first portion, and the first portion is provided on the second portion. The first path is provided within the first portion, and the second path is provided within the second portion. The third path is connected to the first path and the second path. A chiller unit is connected to the first path and the second path. The first path is extended within the first portion along the electrostatic chuck, and the second path is extended within the second portion along the electrostatic chuck. A coolant outputted from the chiller unit passes through the first path, the third path and the second path in sequence, and then is inputted to the chiller unit.