Cross-Configured Conductive Probe Tip for Semiconductor Inspection

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing conductive probes face challenges in achieving reliable electrical contact with semiconductor integrated circuits and electronic parts due to their fragile end portions and the need to consider complex electrode and wiring shapes, which can lead to abrasion and patterning failures during inspection.

Innovation Solution

A conductive probe design featuring a first end portion with four linear ridges and five vertexes arranged in a cross pattern, allowing for multiple contact points and improved durability, reducing the necessity for precise alignment and rotation considerations in the conductive probe unit.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional conductive probe with a simple tip structure is used, then the device complexity is low, but the reliability of electrical contact deteriorates due to fragile end portions and inability to contact various electrode shapes

Engineering Contradiction:
Improveelectrical contact reliabilityVSAvoidprobe tip structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The probe tip is segmented into multiple linear ridges (first to fourth linear ridges) and vertexes (first to fifth vertexes) instead of a single contact point. This segmentation allows different portions of the tip to contact different parts of the electrode or wiring, improving reliability while distributing mechanical stress across multiple segments rather than concentrating it at a single point

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe tip employs an asymmetric configuration with linear ridges of varying lengths and positions, where the first to fourth linear ridges are spaced apart and arranged to form a cross pattern. This asymmetric design enables the probe to adapt to asymmetric electrode shapes and wiring configurations, improving contact reliability without requiring perfect alignment

Inventive Principle:
Principle #4Asymmetry

2Duration of action of stationary object

If the conductive probe uses a single contact point, then the structure is simple, but the durability deteriorates due to concentrated stress and abrasion at the contact point

Engineering Contradiction:
Improveprobe durabilityVSAvoidtip structure complexity
Core Design Contradiction:
Duration of action of stationary objectVSDevice complexity

Solution Approach 1:

The tip is divided into multiple linear ridges and vertexes that distribute contact stress across multiple locations. This segmentation prevents concentrated stress at a single point, reducing abrasion and extending the probe's service life while maintaining structural integrity during repeated contact operations

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The multiple linear ridges and vertexes act as preliminary cushioning elements that distribute and absorb mechanical stress before it can concentrate at any single point. This prior cushioning effect prevents excessive stress concentration that would otherwise lead to tip deformation or breakage, thereby improving durability

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

3Ease of operation

If the conductive probe requires precise alignment with electrodes and wiring, then contact precision is high, but the ease of operation deteriorates due to rotation considerations and complex positioning requirements

Engineering Contradiction:
Improveprobe positioning easeVSAvoidcontact alignment precision
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The probe tip is designed with multiple linear ridges and vertexes that can contact various electrode shapes and wiring configurations (horizontal, bent, spherical solder balls). This multi-functional design allows the same probe structure to effectively contact different geometries without requiring precise alignment adjustments, simplifying operation while maintaining adequate contact precision

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The asymmetric arrangement of linear ridges creates a configuration that is insensitive to rotation and misalignment. The cross-pattern spacing of the ridges ensures that at least one ridge or vertex will make contact regardless of the probe's rotational orientation, eliminating the need for precise angular alignment and simplifying positioning operations

Inventive Principle:
Principle #4Asymmetry

Data Source

PatentUS10274517B2Conductive probe for inspection and semiconductor inspection device
Publication Date: 2019.04.30 NHK SPRING CO LTD
  • US10274517B2 patent drawing
  • US10274517B2 patent drawing
  • US10274517B2 patent drawing

AI summary

Provided is a conductive probe having a first end portion and a second end portion opposing the first end portion. The first end portion includes first to fourth linear ridges and first to fifth vertexes, and the first to fourth linear ridges are spaced from one another and arranged to form a cross. The first to fourth vertexes are located on an outer circumference of the first end portion and further arranged between the first linear ridge and the second linear ridge, between the second linear ridge and the third linear ridge, between the third linear ridge and the fourth linear ridge, and between the fourth linear ridge and the first linear ridge, respectively.