Cryogenic Vacuum Holding Stage with Stationary Cooling Panel
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Solution Overview
Problem
Conventional holding apparatuses for processing objects in vacuum chambers are limited in cooling to cryogenic temperatures and face issues with coolant leakage, leading to impaired processing and apparatus damage.
Innovation Solution
A holding apparatus with a rotatable stage and a cooling system using a stationary cooling panel and a refrigerated heat transfer shaft, supplemented by inert gas cooling, which maintains vacuum conditions and prevents coolant leakage by using a tubular rotary shaft and vacuum seals, allowing for efficient cryogenic cooling without circulating water.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If cooling water is circulated inside the stage to cool the to-be-processed object, then the cooling effect is improved, but the risk of coolant leakage into the vacuum chamber increases
Solution Approach 1:
The invention extracts the coolant circulation system from the vacuum chamber environment by using a stationary cooling panel positioned outside the vacuum seal, eliminating the risk of coolant leakage into the vacuum chamber while maintaining effective cooling of the to-be-processed object
Solution Approach 2:
The stationary cooling panel acts as an intermediary between the coolant system and the to-be-processed object, transferring cooling effects through thermal conduction and radiation without requiring direct contact or vacuum-sealed connections
2Reliability
If a complete watertight construction is employed to prevent coolant leakage, then the reliability is improved, but the device complexity and cost increase
Solution Approach 1:
The invention removes the need for complex watertight constructions by extracting the cooling system from the vacuum chamber, using a stationary cooling panel that operates outside the vacuum environment, thereby simplifying the overall device structure
Solution Approach 2:
The cooling system is segmented into a stationary cooling panel positioned outside the vacuum chamber and a heat transfer component inside, allowing the coolant circulation to be isolated from the vacuum environment and eliminating the need for complex sealing mechanisms
3Adaptability or versatility
If the stage is driven for rotation during processing, then the processing capability is improved, but the risk of coolant leakage into the vacuum chamber increases
Solution Approach 1:
The invention extracts the coolant circulation system from the rotating stage by using a stationary cooling panel positioned outside the vacuum chamber, eliminating the risk of coolant leakage during rotational processing while maintaining full rotational capability
Solution Approach 2:
The system is segmented into the rotating stage for processing and a stationary cooling panel for temperature control, allowing independent operation of each component without compromising the other
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the substrate to be cooled to cryogenic temperatures, such as -200 °C, while maintaining vacuum integrity and preventing coolant leakage, thus enhancing processing efficiency and apparatus safety.
Implementation Method 1
a refrigerator (33) for refrigerating the heat transfer shaft body (32)
Implementation Method 2
a cooling panel (31) disposed in the space (24) in a manner to face, with a clearance to, the lower surface of the stage (1)... the stage (1) is cooled due to heat exchanging as a result of striking, against the stage (1), of the inert gas supplied to the above-mentioned clearance (D)
Implementation Method 3
the stage (1) is cooled due to heat exchanging as a result of striking, against the stage (1), of the inert gas supplied to the above-mentioned clearance (D)
Implementation Method 4
a tubular rotary shaft body (21) which is mounted on a wall surface of the vacuum chamber (Vc), in a penetrating manner, through a first vacuum seal (22)
Data Source
Figure 1
Figure 2
Figure 3(a)~3(d)
AI summary
There is provided a holding apparatus which is capable of rotatably holding, while cooling to a cryogenic temperature, a to-be-processed object in a vacuum chamber. A holding apparatus HS for rotatably holding, while cooling, a to-be-processed object W in a vacuum chamber 1, has a stage 1 on which the to-be-processed object is placed, a rotary drive means 2 for rotatably supporting the stage, and a cooling means 3 for cooling the stage. Provided that a stage surface side on which the to-be-processed object is placed is defined as an upside, the rotary drive means has: a tubular rotary shaft body 21 which is mounted on a wall surface of the vacuum chamber, in a penetrating manner, through a first vacuum seal 22; a connection member 23 for connecting an upper end part of the rotary shaft body 21 and a lower surface of the stage in a manner to define a space 24 below the stage; and a driving motor 25 for driving to rotate the rotary shaft body. Cooling means has: a cooling panel 31 disposed in the space below the stage with a clearance to a lower surface of the stage; a heat transfer shaft body 32 which is inserted into an inside of the rotary shaft body so as to come into contact with the lower surface of the cooling panel; and a refrigerator 33 for cooling the heat transfer shaft body.