Curved Resonant Cavity Structure for Light-Emitting Devices

The patent applies preliminary action by pre-forming a concave portion in the substrate before epitaxial growth. This pre-prepared geometric feature enables the subsequent formation of a curved resonant cavity structure without requiring complex post-processing steps. The concave portion serves as a template that guides the epitaxial growth to create the desired curved cavity shape, thereby improving optoelectronic performance while avoiding manufacturing complexity.

The patent implements curvature by forming a resonant cavity with a curved reflective surface rather than a flat one. The concave portion in the substrate and the resulting curved cavity structure enhance light confinement and resonance effects, improving optoelectronic performance. The curved geometry is achieved through the pre-formed concave portion and controlled epitaxial growth, making curved cavity fabrication feasible without excessive manufacturing complexity.

The patent uses preliminary action by creating a concave portion in the substrate before epitaxial growth. This pre-formed geometric feature serves as a mold or template that enables the formation of a curved cavity with enhanced light confinement properties. By preparing the substrate geometry in advance, the patent achieves curved cavity fabrication through a relatively simple sequential process rather than attempting to create curved surfaces through complex post-growth processing.

The patent replaces mechanical machining or physical shaping methods with an epitaxial growth approach. Instead of mechanically machining curved cavities into the substrate (which would be complex and difficult), the patent uses chemical epitaxial growth to form the curved cavity structure conformally on the pre-formed concave portion. This substitution of mechanical processes with chemical deposition processes significantly eases manufacturing while achieving the desired curved geometry for enhanced light confinement.