Curved Opposing Field Grid for Charged Particle Energy Analysis
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Solution Overview
Problem
Existing particle beam apparatuses face challenges in accurately detecting interaction particles with varying energies due to aperture aberrations, leading to incomplete detection of particles with threshold energy, especially when the crossover position changes with altered imaging properties.
Innovation Solution
The analysis device incorporates a curved opposing field grid and an electrostatic or magnetic lens, where the lens is excited to compensate for crossover displacement, ensuring particles with threshold energy pass through parallel to the detector, and the curvature is adjustable to accommodate different crossover positions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a fixed curvature opposing field grid is used, then particles with threshold energy can be detected, but aperture aberrations cause incomplete detection when crossover position changes
Solution Approach 1:
The opposing field grid's curvature is made dynamically adjustable rather than fixed. The grid can change its curvature radius to adapt to different crossover positions that occur when imaging properties change, ensuring continuous accurate detection of particles with threshold energy across varying operational conditions.
Solution Approach 2:
The curvature radius of the opposing field grid is changed as a controllable parameter. By adjusting this geometric parameter, the grid maintains its ability to focus and detect particles with threshold energy even when the crossover position shifts due to changes in imaging properties such as focal length or magnification.
2Measurement precision
If the opposing field grid curvature is adjusted for different crossover positions, then detection accuracy is maintained, but device complexity increases
Solution Approach 1:
The opposing field grid is designed to serve multiple functions: it provides the primary electric field for particle detection while simultaneously acting as an adjustable optical element to correct aperture aberrations. This multi-functionality reduces the need for separate adjustment mechanisms, thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures that both near and far particles with threshold energy are accurately detected, minimizing aberrations and maintaining energy resolution across varying imaging conditions.
Implementation Method 1
an electrostatic and/or magnetic lens is provided
Implementation Method 2
an electrostatic and/or magnetic lens is provided
Implementation Method 3
at least one opposing field grid device is provided to which a voltage is applied in such a way that a portion of the charged particles is reflected by the opposing field grid device
Data Source
AI summary
An analysis device, possibly having an electrostatic and/or magnetic lens, analyzes the energy of charged particles and has an opposing field grid device to which a voltage is applied in such a way that a portion of the charged particles is reflected by the opposing field grid device. Another portion of the charged particles passes through the opposing field grid device and is detected by a detector. The opposing field grid device has a curvature. A center of curvature is an intersection point of an optical axis with the opposing field grid device. The curvature has a radius of curvature which is given by the section between the center of curvature and a starting point on the optical axis. The opposing field grid device is curved in the direction of the starting point as viewed from the center of curvature and/or is arranged to be displaceable along the optical axis.