Curved Repellent Electrode for Source Arc Ionization Efficiency
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Solution Overview
Problem
Ion implantation systems face inefficiencies in ionization due to suboptimal design of repellent electrodes in source arc chambers, leading to reduced ionization efficiency of gas in the arc chamber.
Innovation Solution
A repellent electrode with a surface shape that mirrors the inner chamber space, maintaining a minimized gap with the sidewall to enhance electron repulsion and ionization efficiency, increasing the surface area for repelling thermal electrons effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional repellent electrode with a simple shape is used, then the device complexity is low, but the ionization efficiency is reduced due to insufficient electron repulsion
Solution Approach 1:
The repellent electrode employs a curved surface that mirrors the inner chamber space geometry, replacing a simple flat or cylindrical shape. This curvature increases the surface area in contact with thermal electrons, enhancing electron repulsion and ionization efficiency without adding mechanical complexity to the overall device structure
Solution Approach 2:
The electrode surface is designed with varying local properties - the surface shape specifically mirrors the inner chamber space to maximize electron interaction in critical regions, while other portions maintain simpler geometries. This localized optimization improves ionization where needed without uniformly increasing device complexity
2Productivity
If the gap between the repellent electrode and inner sidewall is increased, then the ease of manufacture is improved, but the ionization efficiency is reduced due to decreased electron repulsion effectiveness
Solution Approach 1:
The repellent electrode surface is pre-shaped to mirror the inner chamber space geometry during manufacturing, so that when installed, the gap is automatically minimized throughout without requiring post-installation alignment adjustments. This preliminary geometric preparation simplifies the installation process while maintaining manufacturing precision
Solution Approach 2:
The electrode design uses an asymmetric shape that specifically mirrors the non-symmetric inner chamber space, allowing the gap to be minimized in the critical directions where electron repulsion occurs, while tolerating larger gaps in non-critical areas, thus reducing overall alignment precision requirements
3Productivity
If the surface area of the repellent electrode is increased, then the ionization efficiency is improved through enhanced electron repulsion, but the device complexity increases
Solution Approach 1:
The curved surface of the repellent electrode serves multiple functions simultaneously: it provides a large surface area for electron repulsion, mirrors the inner chamber space to optimize gap distribution, and maintains structural integrity as a single component. This multi-functionality increases ionization efficiency without proportionally increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution increases the number of electrons repelled back into the gas, enhancing ionization efficiency and improving the generation of desired ion species for implantation processes.
Implementation Method 1
A gap between the repellent surface and the inner sidewall of the source arc chamber is minimized... to enhance electron repulsion and ionization efficiency
Implementation Method 2
an electrical discharge interacts with a gas to create a plasma of a variety of ion species
Implementation Method 3
enhancing ionization efficiency and improving the generation of desired ion species
Data Source
AI summary
The current disclosure is directed to a repellent electrode used in a source arc chamber of an ion implanter. The repellent electrode includes a shaft and a repellent body having a repellent surface. The repellent surface has a surface shape that substantially fits the shape of the inner chamber space of the source arc chamber where the repellent body is positioned. A gap between the edge of the repellent body and the inner sidewall of the source arc chamber is minimized to a threshold level that is maintained to avoid a short between the conductive repellent body and the conductive inner sidewall of the source arc chamber.