Curved Spring Suspension for Dual-Axis Microscanner Scanning

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Solution Overview

Problem

Existing microscanners face challenges in achieving high scanning frequencies and large scanning angles while maintaining a compact design and independent axes, often requiring wide springs and rigid gimbals that lead to mechanical stress and crosstalk.

Innovation Solution

A microscanner design featuring a deflection element suspended by a spring device with arced spring elements arranged in a ring, allowing orthogonal oscillations around two axes, decoupling mechanical stresses and reducing crosstalk without a gimbal, using a torsion spring system for adjustable resonance frequencies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If wide springs and rigid gimbals are used to achieve high scanning frequencies and large scanning angles, then scanning performance is improved, but mechanical stress and crosstalk increase

Engineering Contradiction:

Improvescanning frequencyVSAvoidmechanical stress

Core Design Contradiction:

SpeedVSStress or pressure

Solution Approach 1:

The suspension system is segmented into multiple spring elements arranged in a ring around the deflection element, with each spring element independently anchored to the support structure. This segmentation distributes mechanical stresses across multiple elements rather than concentrating them in a single wide spring or rigid gimbal, enabling high scanning frequencies while reducing mechanical stress and crosstalk.

Inventive Principle:

Principle #1Segmentation

2Speed

If wide springs are used to achieve high scanning frequencies, then scanning performance is improved, but device complexity increases

Engineering Contradiction:

Improvescanning frequencyVSAvoidspring structure complexity

Core Design Contradiction:

SpeedVSDevice complexity

Solution Approach 1:

Multiple spring elements are merged into a ring-shaped configuration that collectively provides the necessary stiffness and flexibility for high scanning frequencies. This ring arrangement combines the functional benefits of multiple springs while presenting a compact, symmetric structure that simplifies manufacturing and reduces overall device complexity compared to individual wide springs or rigid gimbal structures.

Inventive Principle:

Principle #5Merging (Combining)

3Adaptability or versatility

If rigid gimbals are used to achieve independent axes, then axis independence is improved, but mechanical stress and crosstalk increase

Engineering Contradiction:

Improveaxis independenceVSAvoidmechanical stress

Core Design Contradiction:

Adaptability or versatilityVSStress or pressure

Solution Approach 1:

The rigid gimbal mechanical system is replaced with a spring-based suspension system where the deflection element is suspended by spring elements that can elastically deform. This substitution maintains axis independence through the geometric arrangement of springs while eliminating the mechanical stress and crosstalk associated with rigid gimbal structures, allowing for high scanning frequencies and large scanning angles.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves high scanning frequencies and large scanning angles with a compact size, reducing mechanical stress and crosstalk, enabling efficient Lissajous projections suitable for mobile consumer products.

Implementation Method 1

a spring device, by means of which the deflection element is suspended on the support structure in an oscillating manner in such a way that it can simultaneously carry out a first rotational oscillation around a first oscillation axis and a second rotational oscillation around a second oscillation axis orthogonal thereto

Methodology Applied

Scientific EffectElasticity: Elasticity

Implementation Method 2

The spring elements are each anchored on the one hand to a first anchoring point on the support structure and on the other hand (i) indirectly, in particular via a torsion spring

Methodology Applied

Scientific EffectTorsion Spring: Torsion Spring

Data Source

PatentUS20250296833A1Microscanner having a deflecting element and having spring elements curved towards same for suspension of the deflecting element in a manner capable of oscillation

Publication Date: 2025.09.25 OQMENTED GMBH

AI summary

A microscanner for projecting electromagnetic radiation onto an observation field has: a deflection element having a mirror surface designed as a micromirror for deflecting an incident electromagnetic beam; a support structure that surrounds the deflection element at least in some sections; and (iii) a spring device, by means of which the deflection element is suspended on the support structure in an oscillating manner in such a way that it can simultaneously carry out a first rotational oscillation around a first oscillation axis and a second rotational oscillation around a second oscillation axis orthogonal thereto relative to the support structure, in order to be able to effectuate a Lissajous projection in an observation field by reflection of an electromagnetic beam incident on the deflection element during the simultaneous oscillations. The spring device has a plurality of spring elements arranged together in a ring around the deflection element, which are each anchored, on the one hand, to a first anchoring point on the support structure and, on the other hand, are anchored directly or indirectly to a second anchoring point on the deflection element. In between, they each have an at least partially arced course such that this arced course is curved in the direction toward the deflection element.