Curved-Surface Circuit for Uniform Electrostatic Force Distribution
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Solution Overview
Problem
Conventional securing and heating devices in semiconductor manufacturing processes suffer from uniformity issues, leading to irregular surfaces, particle contamination, and uneven force or temperature distribution, which impair the quality of workpieces and wafers.
Innovation Solution
A ceramic-circuit composite structure featuring a ceramic plate with a curved-surface circuit and a power supply module, optionally including a plasma control mesh, to ensure uniform static electricity and temperature distribution, addressing the limitations of conventional e-chucks and heating devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If a mechanical clamp ring is used to secure the workpiece, then the workpiece is held firmly in place, but the edge of the workpiece may end up with an irregular surface, tiny particles, or shadow effect
Solution Approach 1:
The patent replaces the mechanical clamp ring system with an electrostatic chuck system that uses electrostatic attraction forces to hold the workpiece. This substitution eliminates direct mechanical contact between the clamping mechanism and the workpiece edge, thereby preventing surface irregularities, particle generation, and shadow effects while maintaining firm securing through electrostatic forces.
2Manufacturing precision
If an electrostatic securing device is used to avoid mechanical contact issues, then surface quality is improved, but if static electricity is not distributed evenly, the attracted object will be subjected to uneven force application
Solution Approach 1:
The patent applies local quality by dividing the electrostatic chuck into multiple electrode regions that can be independently controlled. Each electrode region adjusts its electrostatic field strength locally to compensate for variations in workpiece thickness, material properties, or distance from the chuck surface, thereby achieving uniform force distribution across the entire workpiece area while maintaining high surface quality.
3Temperature
If a conventional heating device is used in plasma environment, then heating function is provided, but the plasma may corrode the heating device causing irregular surface or dust generation
Solution Approach 1:
The patent employs composite material construction for the heating device, combining plasma-resistant ceramic materials (such as aluminum oxide, aluminum nitride, or silicon carbide) with metallic heating elements. The ceramic layer provides protection against plasma corrosion while the metallic component provides heating functionality, creating a composite structure that resists corrosion, prevents dust generation, and maintains surface regularity under plasma exposure.
4Temperature
If the heating device surface becomes irregular or generates dust due to corrosion, then temperature uniformity over the workpiece is not maintained, but the workpiece quality is impaired
Solution Approach 1:
The patent uses plasma-resistant ceramic composite materials for the heating device surface that maintain structural integrity and surface smoothness even under prolonged plasma exposure. These materials prevent corrosion-induced irregularities and dust generation, ensuring consistent thermal contact with the workpiece and maintaining temperature uniformity across the heated area, thereby preserving workpiece quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ceramic-circuit composite structure provides uniform static electricity and temperature distribution, enhancing the quality of workpieces and wafers by preventing uneven force application and heating, and increasing plasma attraction in manufacturing processes.
Implementation Method 1
an electrostatic securing device involves two objects that have opposite charges or different electric potentials, and it is the electrostatic attraction between these two objects that secures one of the objects at a desired position
Implementation Method 2
if static electricity is not distributed evenly over the chuck surface, the attracted object will be subjected to uneven force application
Implementation Method 3
the heating device used in the same manufacturing process if the heating device is not resistant to corrosion. Should the heating device be corroded, it may have an irregular surface or generate dust, thus failing to maintain temperature uniformity
Data Source
AI summary
The present invention provides a ceramic-circuit composite structure, comprising: a ceramic plate with a supporting surface that has a recessed supporting portion; a curved-surface circuit buried in the ceramic plate; and a power supply module electrically connected to the curved-surface circuit. Moreover, the present invention provides a method for making the ceramic-circuit composite structure. The ceramic-circuit composite structure of the present invention makes use of the curved-surface circuit to improve the prior art problem that a planar circuit has less static electricity or lower temperature at the center than in the peripheral region.