CVD Substrate Lifter Structure for Centered Motion and Heat Isolation
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Solution Overview
Problem
Existing lifting devices in chemical vapor deposition (CVD) facilities face issues with eccentric power sources and deformation due to heat, leading to precise control challenges and substrate alignment errors.
Innovation Solution
A lifting device with a gantry-type base, guide tracks, a level regulator, and ceramic shafts to maintain centered power and minimize heat transfer, using cooling plates and buffer members to prevent deformation and ensure substrate alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a motor is installed on one side of the lifting device, then the structure can accommodate the power source, but the power source becomes eccentric causing distortion of the raising and lowering part
Solution Approach 1:
The patent applies asymmetry by intentionally designing the motor mounting position offset from the center, and compensating for this asymmetry through a specifically designed linkage mechanism that translates the eccentric motor motion into centered lifting action, thus resolving the contradiction between structural accommodation and precision control
Solution Approach 2:
The patent introduces an intermediary linkage mechanism (including connecting rods and joints) that mediates between the eccentric motor and the centered lifting shaft, transforming the asymmetric motor motion into symmetric centered lifting motion, thereby eliminating the direct negative impact of eccentric power source placement
2Productivity
If the lifting device operates in a high-temperature chamber, then the CVD process can proceed, but heat is transferred to the susceptor and lifting device causing deformation
Solution Approach 1:
The patent introduces a ceramic shaft as an intermediary component between the high-temperature chamber environment and the lifting mechanism. The ceramic material provides thermal isolation while maintaining mechanical strength, preventing heat transfer to the susceptor and lifting device, thus resolving the contradiction between enabling CVD process and maintaining structural stability
Solution Approach 2:
The patent employs composite material construction, particularly using ceramic materials for the shaft and structural components exposed to heat. This composite approach combines materials with different thermal properties to create a lifting device that can withstand high-temperature environments without deformation, enabling both CVD productivity and structural stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces the probability of substrate alignment errors and deformation, ensuring precise control and stability during the CVD process by maintaining a centered power source and minimizing heat-induced distortions.
Implementation Method 1
a cooling channel is included in the top cooling plate and the bottom cooling plate
Implementation Method 2
a cooling channel is included in the top cooling plate and the bottom cooling plate
Data Source
AI summary
Provided is a lifting device mounted to a substrate deposition equipment, the lifting device including a gantry-type base including a top plate and a pair of side plates and having a space formed inside; a guide track formed on each of the pair of side plates that faces each other; a guide unit configured to move upward or downward along the guide track; a linker formed in an internal space of the base and configured to connect to the guide unit; a level regulator attached to the linker; a top cooling plate attached to the top of the level regulator; a ceramic shaft configured to guide the rise and fall of a ceramic plate at the center of the top cooling plate; and a lifting shaft configured to insert into the inside of the ceramic shaft and to connect to a susceptor.