Cyclone Slurry Separator with Integrated Mixing
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Solution Overview
Problem
Conventional cyclones are inefficient in separating slurry particles by size, leading to the formation of macro-particles due to agglomeration during transportation, which results in waste and increased costs in semiconductor manufacturing.
Innovation Solution
A cyclone with optimized relative ratios between its inlet, cylindrical, and conical passageways, along with a vortex finder, is designed to apply reduced shear stresses and enhance separation efficiency, integrated with a system that reproduces and mixes slurry and deionized water in a single unit to prevent macro-particle formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional cyclones are used for slurry separation, then the structure is simple, but the separation efficiency is low and macro-particle formation occurs
Solution Approach 1:
The cyclone is divided into three distinct passageways: inlet passageway, cylindrical passageway, and conical passageway. Each segment is optimized for specific functions - the inlet passageway introduces slurry with reduced shear stress, the cylindrical passageway maintains uniform flow for separation, and the conical passageway concentrates flow to enhance separation efficiency and prevent macro-particle formation.
Solution Approach 2:
Different sections of the cyclone are designed with locally optimized characteristics. The inlet passageway has specific dimensional ratios to reduce shear stress, the cylindrical passageway has uniform cross-section for stable flow, and the conical passageway has tapering geometry to concentrate flow. The vortex finder is positioned at specific locations to optimize particle separation while maintaining overall structural simplicity.
2Adaptability or versatility
If slurry is transported between separation and mixing units, then the process can be modular, but macro-particles form due to agglomeration during transport
Solution Approach 1:
The separation unit and mixing unit are merged into a single integrated apparatus. The cyclone separator is directly connected to the mixing chamber, eliminating the need for external transport containers. This integration ensures that separated slurry is immediately mixed with deionized water without undergoing transport-induced agglomeration, thus preventing macro-particle formation while maintaining process modularity through a unified design.
3Speed
If high shear stress is applied to slurry in the inlet, then flow velocity increases, but particle aggregation increases
Solution Approach 1:
The inlet passageway is designed with specific dimensional parameters (length, diameter, and ratio to cylindrical passageway) to control shear stress. By optimizing these geometric parameters, the inlet passageway achieves sufficient flow velocity while limiting excessive shear stress that would cause particle aggregation. This parameter optimization allows balanced flow characteristics that prevent macro-particle formation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The cyclone achieves improved separation efficiency, reducing macro-particle formation and minimizing waste by integrating the separation and mixing processes, thereby optimizing the slurry supply for chemical mechanical polishing (CMP) processes.
Implementation Method 1
a cyclone constructed according to a preferred embodiment of the invention is provided with an inlet passageway, a cylindrical passageway, and a conical passageway with optimized relative ratios between their lengths
Implementation Method 2
The cyclone has an inlet passageway through which the slurry is introduced, and a cylindrical passageway and a conical passageway in which the slurry is rotated
Implementation Method 3
A cyclone in accordance with one aspect of the present invention includes a body and a vortex finder
Data Source
AI summary
A cyclone used in a separator apparatus includes a body and a vortex finder. The body includes an inlet passageway, a cylindrical passageway connected to the inlet passageway, and a conical passageway connected to the cylindrical passageway. The cylindrical passageway has an upper end through which first particles in a fluid are exhausted, and a lower end. The conical passageway has an upper end connected to the lower end of the cylindrical passageway, and an opened lower end through which second particles having a specific gravity greater than that of the first particle are exhausted. The vortex finder is connected to the upper end of the cylindrical passageway. A first exhaust passageway is vertically formed in the vortex finder so that the first particles spirally ascend through the first exhaust passageway from the cylindrical passageway.