Cyclotron Variable Energy Extraction With a Movable Stripper
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Isochronous cyclotrons used in high energy ion implantation systems are limited to operating at a single output energy, making them incompatible with the stringent beam control and reproducibility requirements of semiconductor manufacturing, as they either produce discrete energy steps or a large spread of ion energies.
Innovation Solution
A cyclotron-based ion implanter system with a variable RF power amplifier and a movable stripper that can intercept the ion beam at a continuum of positions within the cyclotron, allowing for continuous adjustment of ion energy between discrete steps, enabling the generation of a monoenergetic ion beam with continuously variable energy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a cyclotron operates at a single output energy to maintain stable beam extraction, then beam reliability is improved, but energy adaptability deteriorates
Solution Approach 1:
The stripper is made movable along the radial direction, allowing its position to be dynamically adjusted. This enables the cyclotron to extract beams at different energies by changing the stripper position, transforming a static extraction system into a dynamic one that can adapt to different energy requirements while maintaining stable extraction at each set point
Solution Approach 2:
The system changes the physical parameter of stripper position to achieve energy variation. By adjusting the radial position of the stripper, the beam energy at extraction point is changed, allowing the cyclotron to provide continuously variable energy output while maintaining reliable extraction at each energy level
2Device complexity
If discrete energy steps are used for variable energy output, then device complexity is reduced, but manufacturing precision deteriorates
Solution Approach 1:
The system replaces discrete mechanical energy selection with continuous mechanical positioning of the stripper. Instead of using complex mechanical switches or selectors for discrete energies, a movable stripper provides continuous energy adjustment, achieving higher precision without proportionally increasing device complexity
Solution Approach 2:
The movable stripper enables continuous energy adjustment by changing position, replacing discrete energy steps with a continuous range. This dynamic positioning system provides precise energy control while maintaining relatively simple extraction hardware
3Adaptability or versatility
If a large spread of ion energies is produced for variable energy output, then energy adaptability is improved, but measurement precision deteriorates
Solution Approach 1:
The movable stripper creates a localized extraction point at a specific radial position. By concentrating the extraction at a precise location rather than allowing a broad energy spread, the system achieves monochromatic beam output while maintaining the ability to access a wide energy range by moving the stripper to different positions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise control of ion energy, reducing the need for additional beamline components and enabling precise implant depth adjustment and scanning, enhancing the suitability for semiconductor processing by providing a continuously variable high energy ion beam.
Implementation Method 1
a cyclotron to receive the negative ion beam as an incident ion beam at an incident ion energy, and output the negative ion beam as a positive ion beam at an accelerated ion energy. The apparatus may further include an RF source to output an RF power signal to the cyclotron
Implementation Method 2
a movable stripper, translatable to intercept the ion beam within the cyclotron at a continuum of different positions
Data Source
AI summary
An apparatus may include a cyclotron to receive an ion beam as an incident ion beam at an initial energy, and output the ion beam as an accelerated ion beam at an accelerated ion energy. The apparatus may further include an RF source to output an RF power signal to the cyclotron chamber, the RF power source comprising a variable power amplifier, and a movable stripper, translatable to intercept the ion beam within the cyclotron at a continuum of different positions.