Deck Select Transistor 3D Cross-Point Memory Density

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Solution Overview

Problem

Increasing the number of memory cells in a 3-D cross point memory array proportionally increases the number of decoder transistors required, leading to a larger footprint and challenging the goal of high-density memory arrays for a given die size.

Innovation Solution

Integrating deck select transistors within each word line and bit line of a deck, and collectively coupling vertically spaced word lines and bit lines across multiple decks with interconnect vias, reducing the number of decoder transistors needed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the number of memory cells in a 3-D cross point memory array is increased, then memory density is improved, but the number of decoder transistors increases proportionally, worsening the decoder transistor footprint

Engineering Contradiction:
Improvememory densityVSAvoiddecoder transistor footprint
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The patent combines multiple vertically-spaced word lines from different decks into a single integrated word line structure. This merging allows one decoder transistor to control multiple decks simultaneously, reducing the total number of decoder transistors required while maintaining the ability to access individual memory cells across increased memory density

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated word line structure serves multiple functions: it acts as a selector for individual memory cells within a deck, provides common control across multiple decks, and enables scalable memory expansion. This multi-functionality allows the same decoder transistor to serve multiple decks, reducing the proportional increase in decoder transistors as memory density increases

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentEP4012771B1Deck select transistor for three-dimensional cross-point memory
Publication Date: 2025.05.28 INTEL CORP
  • EP4012771B1 patent drawingFigure 1
  • EP4012771B1 patent drawingFigure 2A~2D
  • EP4012771B1 patent drawingFigure 3A~3C

AI summary

The disclosed memory device structure (100) includes a first plurality of line structures (102), where each line structure includes a first transistor channel (108), a second plurality of line structures (112) substantially orthogonal to the first plurality of line structures, where each line structure includes a second transistor channel (118), and a memory cell (122) at each cross-point between the first plurality of line structures and the second plurality of line structures. In particular, the structure is a three-dimensional cross-point array of resistive memory cells with FET deck selection transistors (101A) located at each deck level (128).