Deep N-Well Isolation for RRAM Leakage and Punch-Through

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Solution Overview

Problem

In resistive random access memory (RRAM) circuits, the decreasing feature size of process nodes leads to increased electric fields, drain-induced barrier lowering (DIBL), and bulk punch-through, making it difficult to reset the memory due to low current flow.

Innovation Solution

The method involves forming a deep N-well region in the substrate to isolate it from the P-well region, allowing separate voltage control in the P-well region. By applying a negative voltage to the P-well region, leakage current is reduced, and during normal operations, a positive voltage is applied to facilitate easy turn-on of the transistor structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the feature size of process nodes continues to decrease, then the integration density is improved, but the distance between source end and drain end becomes increasingly short, resulting in enhanced electric field and bulk punch-through

Engineering Contradiction:
Improveintegration densityVSAvoidbulk punch-through
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent divides the substrate into isolated regions by introducing deep N-well regions that physically separate the P-well region containing the transistor from the substrate. This segmentation prevents the enhancement electric field from spreading to the substrate, thereby eliminating bulk punch-through while maintaining high integration density achieved through continued feature size reduction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The deep N-well region acts as an intermediary barrier between the P-well region and the substrate. By applying a negative voltage to the deep N-well region, the patent creates a potential barrier that blocks the enhancement electric field from reaching the substrate, thus preventing bulk punch-through while allowing the transistor to benefit from scaled feature sizes.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Length of moving object

If the distance between source end and drain end is shortened, then the device scaling is improved, but the electric field between source end and drain end is enhanced, causing drain-induced barrier lowering

Engineering Contradiction:
Improvechannel lengthVSAvoiddrain-induced barrier lowering
Core Design Contradiction:
Length of moving objectVSObject-affected harmful factors

Solution Approach 1:

The deep N-well region serves as an intermediary that isolates the P-well region from the substrate, preventing the enhancement electric field generated by short channel lengths from affecting the substrate. This allows continued device scaling with reduced channel lengths while mitigating the harmful effects of enhanced electric fields through the isolating barrier.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If a positive voltage is applied to the P-well region, then the transistor structure is easily turned on, but leakage current increases

Engineering Contradiction:
Improveturn-on easeVSAvoidleakage current
Core Design Contradiction:
Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The patent dynamically adjusts the voltage applied to the deep N-well region based on operational requirements. During normal operation, a negative voltage is applied to suppress leakage current. During reset operations, the voltage is adjusted to facilitate transistor turn-on. This dynamic voltage control allows the system to switch between leakage suppression and easy turn-on modes as needed.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the voltage parameter of the deep N-well region from negative during normal operation to positive during reset operations. This parameter change allows the system to first suppress leakage current during normal operation, then facilitate easy turn-on during reset operations by reversing the voltage polarity, thus resolving the contradiction between leakage suppression and operational ease.

Inventive Principle:
Principle #35Parameter changes

4Use of energy by moving object

If the operating voltage is reduced, then the energy consumption is reduced, but the current flowing through the RRAM is low, making it difficult to reset

Engineering Contradiction:
Improveenergy consumptionVSAvoidreset difficulty
Core Design Contradiction:
Use of energy by moving objectVSEase of operation

Solution Approach 1:

The deep N-well region acts as an intermediary that isolates the P-well region from the substrate, preventing voltage division across the transistor during reset operations. By applying a negative voltage to the deep N-well region, the patent ensures that the full operating voltage is available across the RRAM, enabling effective reset even at reduced operating voltages and thus resolving the contradiction between energy consumption and reset effectiveness.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces leakage current and enhances the turn-on characteristics of the transistor structure, improving the reset operation in RRAM circuits by increasing the turn-on current and reducing the threshold voltage.

Implementation Method 1

forming a deep N-well region in the substrate to isolate it from the P-well region, allowing separate voltage control in the P-well region

Methodology Applied
Scientific EffectElectrostatic isolation: Electrostatics

Implementation Method 2

By applying a negative voltage to the P-well region, leakage current is reduced

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 3

during normal operations, a positive voltage is applied to facilitate easy turn-on of the transistor structure

Methodology Applied
Scientific EffectElectrostatic induction: Electrostatic Induction

Data Source

PatentUS20250157535A1Method for operating memory apparatus, memory apparatus, device, and storage medium
Publication Date: 2025.05.15 XIAMEN IND TECH RES INST CO LTD
  • US20250157535A1 patent drawing
  • US20250157535A1 patent drawing
  • US20250157535A1 patent drawing

AI summary

A method for operating a memory apparatus, a memory apparatus, a device, and a storage medium are provided. The method includes: providing a semiconductor device including a substrate, a deep N-well region disposed in the substrate, a P-well region disposed in the deep N-well region, and a plurality of transistor structures disposed in the P-well region, where each of the transistor structures includes a gate, a source and a drain; and applying a first voltage to a port of the gate, a second voltage to a port of the deep N-well region, and a third voltage to a port of the P-well region. When a first operation is performed, the first voltage is equal to 0, the second voltage is a positive voltage, and the third voltage is a negative voltage; when a second operation is performed, the first, second and third voltages are positive voltages.