Asymmetric Deep-Well IC Structure for Leakage Control

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Solution Overview

Problem

Conventional approaches to reduce current leakage in integrated circuits (ICs) often compromise other attributes such as processing frequency, and are limited by the fundamental concepts of standard cell layouts, which struggle to manage leakage currents effectively while maintaining performance and reliability.

Innovation Solution

The formation of a deep well within a substrate with a well boundary distal to the midpoint, combined with active semiconductor regions of opposing doping types, allows for reduced leakage currents and improved operational reliability without significantly affecting the position and arrangement of nearby logic cells.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If conventional approaches are used to reduce current leakage in standard cells, then current leakage is reduced, but processing frequency and other device attributes are negatively affected

Engineering Contradiction:
Improvecurrent leakageVSAvoidprocessing frequency
Core Design Contradiction:
Object-generated harmful factorsVSSpeed

Solution Approach 1:

The patent applies local quality by creating an asymmetric well structure where the well boundary is positioned distal to the substrate midpoint, specifically extending the well deeper on one side than the other. This localized structural variation allows different regions of the transistor to have different electrical characteristics, enabling leakage reduction in specific areas while preserving processing performance in critical regions.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention fundamentally employs asymmetry by positioning the well boundary distal to the midpoint of the substrate thickness, creating an asymmetric well depth configuration. This asymmetric structure breaks the symmetry of conventional wells, allowing optimized control of electric fields and carrier distribution to reduce leakage without uniformly degrading device performance.

Inventive Principle:
Principle #4Asymmetry

2Ease of manufacture

If standard cell layouts are used, then uniform manufacturing and ease of placement are achieved, but effective management of leakage currents is limited

Engineering Contradiction:
Improvestandard cell layout uniformityVSAvoidleakage current management
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The patent changes the geometric parameter of the well structure by positioning the well boundary distal to the substrate midpoint, creating asymmetric well depths. This parameter modification allows the same standard cell layout framework to achieve improved leakage control without requiring fundamental changes to the manufacturing process or cell architecture.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces current leakage in ICs while maintaining or improving operational reliability and frequency, allowing for more efficient logic operations without altering the fundamental layout of the logic cells.

Implementation Method 1

forming a deep well within a substrate having a first doping type, the deep well including a second doping type opposite the first doping type

Methodology Applied
Scientific EffectDoping: Dopants

Implementation Method 2

the body of the transistor (or back gate in the case of SOI technologies) is electrically biased, e.g., to control the threshold voltage of particular transistors in a device

Methodology Applied
Scientific EffectElectric Field: Electric Field

Data Source

PatentUS11749671B2Integrated circuit structures with well boundary distal to substrate midpoint and methods to form the same
Publication Date: 2023.09.05 GLOBALFOUNDRIES US INC
  • US11749671B2 patent drawing
  • US11749671B2 patent drawing
  • US11749671B2 patent drawing

AI summary

The disclosure provides integrated circuit (IC) structures and methods to form the same. Methods according to the disclosure may be performed on a substrate having a first doping type, the substrate extending between a first end and a second end. A deep well is formed within the substrate, the deep well including a well boundary defined between the deep well and a remainder of the substrate. The well boundary is horizontally distal to a midpoint between the first end and the second end of the substrate. A first active semiconductor region is formed at least partially over the substrate, and an oppositely-doped second active semiconductor region is formed at least partially over the deep well.