Defect Inspection Apparatus Using Segmented Sensor for Parallel Light Irradiation
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Solution Overview
Problem
As the complexity of samples to be inspected increases, such as high-resolution displays, the time required to detect defects using existing inspection apparatuses increases, and there are spatial limitations in designing the structure of a defect inspection apparatus.
Innovation Solution
A defect inspection apparatus is designed with a first unit, second unit, and third unit that irradiate different inspection lights to a sample holder, combined with a camera using a single image sensor with multiple sections to generate images through time delay integration, allowing for simultaneous irradiation of non-overlapping inspection light regions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple inspection lights are used to inspect different regions of the sample, then defect detection accuracy is improved, but the spatial design becomes more complex and time consumption increases
Solution Approach 1:
The image sensor is divided into multiple sections, with each section corresponding to a specific inspection light source. The first image sensor section receives light from the first inspection light, the second image sensor section receives light from the second inspection light, and so on. This segmentation allows each sensor section to independently process images from different inspection regions, thereby improving defect detection accuracy while maintaining manageable spatial design through modular architecture.
2Measurement precision
If multiple inspection lights are used to inspect different regions of the sample, then defect detection accuracy is improved, but inspection time increases
Solution Approach 1:
The inspection system operates continuously by simultaneously irradiating multiple inspection lights to different regions of the sample and having corresponding image sensor sections capture images at the same time. This parallel operation eliminates sequential inspection delays, maintaining continuous useful action across all inspection regions, thereby improving defect detection accuracy without increasing overall inspection time.
3Productivity
If a single image sensor with multiple sections is used, then spatial design is simplified and inspection speed is improved, but the ability to capture different defect appearances is reduced
Solution Approach 1:
Each image sensor section is dedicated to capturing images from a specific inspection light, giving it specialized local quality for detecting particular defect types. The first image sensor section is optimized for defects visible under first inspection light, the second section for defects under second inspection light, and so on. This local quality specialization ensures that diverse defect appearances are captured effectively while maintaining high inspection speed through parallel processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables faster and more accurate defect detection by generating multiple images of the sample with different defect appearances in a single scan, overcoming the limitations of spatial design and increasing inspection speed.
Implementation Method 1
a camera including a single image sensor which generates an image of a sample using time delay integration
Data Source
AI summary
A defect inspection apparatus includes a first unit, a second unit, and a third unit which respectively irradiate first, second, and third inspection lights to the sample holder, a camera including a single image sensor which generates an image of a sample, which moves linearly on the sample holder, using time delay integration, and a detector which detects defects of the sample based on an image provided by the camera, where the first, second, and the third inspection lights are simultaneously irradiated to the sample holder, and where the single image sensor includes first, second, and third sections, the first section which generates an image of the sample taken by the first inspection light, the second section which generates an image of the sample taken by the second inspection light, and the third section which generates an image of the sample taken by the third inspection light.