Deflectable Socket Arrangement for End Block Mounting
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Solution Overview
Problem
Conventional end block mounting systems for tubular cathodes in magnetron sputtering processes are cumbersome, requiring multiple personnel and aids for alignment and handling, and suffer from mechanical stress due to bending moments, leading to reduced service life and increased maintenance costs.
Innovation Solution
A socket arrangement that allows flexible and elastic fastening of the end block to the chamber wall, enabling deflection and alignment with the tubular cathode, reducing mechanical stress and facilitating single-person mounting and maintenance through a two-part design with deflectable socket elements and a spring-elastic coupling structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a rigid end block mounting system is used, then the mounting structure is simple and stable, but it causes high mechanical stress due to bending moments, leading to reduced service life and requiring multiple personnel for alignment
Solution Approach 1:
The socket arrangement transforms the rigid mounting system into a dynamic one by introducing deflectable socket elements that can move relative to each other. The second socket element is designed to be deflectable in relation to the first socket element, allowing the system to adapt to alignment variations and reduce bending moments on the end block, thereby extending service life while maintaining structural integrity
Solution Approach 2:
The mounting system is divided into multiple independent socket elements (first and second socket elements) that can be assembled separately. The fastening arrangements are segmented into multiple engagement points, allowing each component to be manufactured and positioned independently, reducing overall system complexity while enabling flexible assembly by a single person
2Ease of operation
If a rigid fastening system is used, then the structure is stable, but it requires multiple personnel and aids for alignment and handling during installation
Solution Approach 1:
The deflectable second socket element acts as an intermediary between the first socket element and the end block. This intermediary component absorbs alignment variations and reduces the need for precise manual alignment, allowing single-person installation while maintaining strong mechanical connections through the distributed fastening arrangements
Solution Approach 2:
The system changes the mechanical parameters of the connection by introducing play and deflection capability. The fastening arrangements engage with play, allowing the second socket element to deflect, which changes the stiffness parameter of the mounting system to reduce installation complexity while maintaining sufficient strength during operation
3Ease of manufacture
If a two-part socket arrangement with deflectable elements is used, then mechanical stress is reduced and service life extended, but the device complexity increases
Solution Approach 1:
The socket arrangement is segmented into two separate socket elements that can be manufactured independently using standard machining processes. The fastening arrangements are also segmented into multiple discrete engagement points, simplifying manufacturing and assembly while reducing the need for complex alignment procedures during installation and maintenance
Solution Approach 2:
The deflectable design of the second socket element introduces controlled movement capability without requiring complex mechanisms. The play in the fastening arrangements provides inherent flexibility, achieving stress reduction through simple geometric design rather than complex active control systems, thereby maintaining ease of manufacture
Data Source
AI summary
According to various embodiments, a socket arrangement for holding an end block on a process chamber may include the following: a first socket element with a first fastening arrangement for fastening the first socket element on a process chamber wall and with a second fastening arrangement; and a second socket element with a third fastening arrangement, for fastening the second socket element on the first socket element and with a fourth fastening arrangement for fastening an end block on the second socket element; wherein the second fastening arrangement of the first socket element and the third fastening arrangement of the second socket element may be formed for engaging in one another with play in such a way that the second socket element may be deflectable in relation to the first socket element.