Interdigitated DEP Microelectrode Chip for 3D Particle Manipulation

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Solution Overview

Problem

Existing dielectrophoretic systems can only focus microparticles in a vertical direction and lack the ability to control particle movement in multiple dimensions, limiting their applicability to single-type vertical focusing and sample separation.

Innovation Solution

A dielectrophoretic microelectrode actuator with an impedance sensor chip is designed on a semiconductor platform, incorporating multiple input and output channels, allowing for customizable operations such as identification, classification, and quantification of particles by employing both positive and negative dielectrophoretic forces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If vertically arranged electrodes are used for focusing microparticles, then vertical direction focusing is achieved, but multi-dimensional particle movement control is lost

Engineering Contradiction:
Improvevertical focusing capabilityVSAvoidmulti-dimensional particle manipulation
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

The patent transitions from vertically arranged electrodes to horizontally arranged interdigitated microelectrodes, changing the spatial dimension of the electric field generation. This horizontal arrangement creates non-uniform electric fields in the vertical direction, enabling three-dimensional particle manipulation while maintaining focusing capability through positive and negative dielectrophoretic forces.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The interdigitated microelectrode structure serves multiple functions: it generates non-uniform electric fields for dielectrophoretic focusing, enables both positive and negative DEP forces for different particle types, and allows customizable experimental setups for various particle sizes and shapes. This single structure replaces the need for multiple vertically arranged electrode systems.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of manufacture

If fixed-size microelectrodes are used, then manufacturing is simplified, but manipulation of small-sized cell samples is limited

Engineering Contradiction:
Improveelectrode fabrication simplicityVSAvoidsample size adaptability
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent enables dynamic control of dielectrophoretic forces by adjusting voltage parameters and electrode configuration, allowing the same fixed-size microelectrode structure to manipulate particles of varying sizes. The interdigitated design with adjustable gap distances (e.g., 10-50 μm) provides flexibility in controlling field strength and distribution, adapting to different cell dimensions without requiring physical electrode resizing.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system manipulates electrical parameters (voltage amplitude, frequency, phase difference) to adjust the strength and distribution of dielectrophoretic forces. By changing these parameters, the same fixed microelectrode structure can effectively manipulate particles across a range of sizes, from small bacteria to larger cells, maintaining manufacturing simplicity while achieving sample size adaptability.

Inventive Principle:
Principle #35Parameter changes

3Ease of operation

If only negative DEP focusing is implemented, then vertical particle focusing is achieved, but separation of different particle types is not possible

Engineering Contradiction:
Improvefocusing operationVSAvoidparticle classification accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent employs alternating positive and negative dielectrophoretic forces through periodic voltage application to the interdigitated microelectrodes. By switching between positive DEP (attracting particles to high field regions) and negative DEP (repelling particles from high field regions), the system can first focus particles vertically and then separate different particle types based on their dielectric properties, enabling both focusing operation and classification precision.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The interdigitated microelectrode array is divided into multiple independent electrode pairs that can be controlled separately. This segmentation allows different regions to apply different dielectrophoretic forces (positive or negative) simultaneously, enabling vertical focusing in one region while performing particle separation in another region, thus achieving both operations with high precision.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables flexible manipulation and detection of various particle types in continuous-flow microfluidics, facilitating sample collection and enhancing detection accuracy through customizable experimental setups.

Implementation Method 1

Dielectrophoresis (DEP) is a phenomenon that a force is exerted on dielectric particles subjected to a non-uniform electric field. Charged particles are not required for the force.

Methodology Applied
Scientific EffectDielectrophoresis: Dielectric

Implementation Method 2

Cell impedance is calculated based on the difference between a baseline voltage and a voltage measured after cells are attached to an electrode

Methodology Applied
Scientific EffectElectrical impedance: Electrical Resistance

Data Source

PatentUS20250360518A1Method for designing and fabricating dielectrophoretic microelectrode actuator with impedance sensor chip
Publication Date: 2025.11.27 ZHEJIANG NORMAL UNIV
  • US20250360518A1 patent drawing
  • US20250360518A1 patent drawing
  • US20250360518A1 patent drawing

AI summary

Disclosed is a method for designing and fabricating a dielectrophoretic microelectrode actuator with an impedance sensor chip, and the present disclosure is capable of utilizing dielectrophoresis technology to detect in a continuous-flow microfluid for identification, operation, classification and quantification. Examples illustrating various sizes of the present disclosure are also available, such that customizable experiments can be conducted. In the present disclosure, positive and negative dielectrophoretic forces of different types of electrodes are employed, and therefore different types of bacterial particles can be chosen for different types of operations according to experimental interests.