DEP Microelectrode Layout for Lateral and Vertical Particle Separation
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Solution Overview
Problem
Existing dielectrophoresis (DEP) electrodes focus on higher field intensity at a single point, resulting in inefficient manipulation, separation, and fractionation of particles due to limited electric field gradient, particularly in vertical directions.
Innovation Solution
A lateral and vertical DEP method using two high-intensity electric fields, which involves specific fabrication steps including resist plasma etching, metal etching, and a four-step etching technique to create microelectrodes with a higher electric field gradient for efficient particle manipulation and separation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If DEP electrodes focus on higher field intensity at a single point, then the electric field gradient at the top edge is increased, but the manipulation and separation efficiency of target particles remains low
Solution Approach 1:
The patent divides the electric field generation into two separate high-intensity field sources instead of relying on a single point. This segmentation creates multiple zones of high field intensity that work together to improve both the electric field gradient and particle manipulation efficiency simultaneously
Solution Approach 2:
The patent transitions from a single-point field focus to a multi-point field distribution, adding spatial dimensionality to the electric field configuration. This dimensional change enables simultaneous optimization of field gradient strength and particle separation efficiency across different regions
2Force
If a single-point high-intensity electric field is used, then the field intensity at one location is maximized, but lateral and vertical particle motion control is insufficient
Solution Approach 1:
The patent introduces multiple spatial dimensions for field intensity distribution by using two separate high-intensity electric fields. This enables independent control of lateral (Y-axis) and vertical (Z-axis) particle motions, providing versatile manipulation capability while maintaining high field intensity
Solution Approach 2:
Different regions of the electric field are optimized for different functions: one high-intensity field region controls lateral particle motion while another controls vertical motion. This local quality differentiation enables precise multi-directional particle manipulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method achieves more efficient manipulation, separation, and fractionation of target and non-target particles through lateral positive dielectrophoresis (PDEP) and vertical negative dielectrophoresis (NDEP) forces, improving separation efficiency and selectivity.
Implementation Method 1
Dielectrophoresis (DEP) is a technique for particle manipulation using dielectric properties of particles. For the technique, sinusoidal time-varying and spatially non-uniform electric fields are used to manipulate positions of particles based on dielectric properties of the particles.
Implementation Method 2
DEP-based particle and cell separation which uses force of dielectric polarization (FDEP) exhibits better reliability and performance in terms of sensitivity and selectivity.
Data Source
AI summary
Disclosed is a lateral and vertical dielectrophoresis method for micro/nano-scale biological and metabolic sensors and actuators using two high-intensity electric fields, including: S1. performing resist plasma etching before metal etching to form a resist profile at a sidewall, where a high-pressure baseline formulation includes oxygen, nitrogen and argon in a ratio of 1:4:140, with a pressure of 1600 mT, and an RF power of 1300 W, which is used to produce a pre-designed angle resist; S2. performing metal etching, a baseline instruction includes chlorine, boron trichloride, and argon, with a preferred ratio of 1:0.4:0.2, a pressure of 8 mT, a source power of preferably 1200 W, and a bias power of preferably 175 W; and S3. performing metal profiling measurement to measure a remaining thickness. The method enables manipulation, separation, and fractionation of target and non-target particles in the medium through lateral positive dielectrophoresis attractive force at Y.