Deposition Mask Alignment Structure for Precise OLED Layer Patterning
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Solution Overview
Problem
Existing deposition mask apparatuses face challenges in achieving precise alignment accuracy during the manufacturing of organic EL display devices, leading to inconsistencies in the formation of deposition layers.
Innovation Solution
The introduction of a deposition mask apparatus comprising a frame, deposition mask, and alignment mask, with specific weld configurations and alignment holes, enhances alignment accuracy by allowing for precise alignment and contact with the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a deposition mask is used to form pixels in organic EL display devices, then the desired pattern of light emitting layers can be achieved, but alignment accuracy between the deposition mask and substrate deteriorates
Solution Approach 1:
An alignment mask is introduced as an intermediary component between the deposition mask and substrate. The alignment mask includes alignment holes that enable precise alignment with the substrate before the deposition mask is positioned, thereby improving alignment accuracy and reducing misalignment defects in the light emitting layers.
Solution Approach 2:
The apparatus is segmented into distinct functional components: a frame, a deposition mask with through-holes for material deposition, and a separate alignment mask with alignment holes. This segmentation allows the alignment function to be independently optimized without interfering with the deposition process, improving overall alignment precision.
2Ease of manufacture
If the deposition mask apparatus structure is simplified, then manufacturing ease is improved, but alignment accuracy deteriorates
Solution Approach 1:
The alignment mask and deposition mask are combined in a single apparatus structure, both being joined to the frame. This merging allows the alignment function and deposition function to work together in a unified system, maintaining manufacturing simplicity while achieving high alignment accuracy through the coordinated action of alignment holes and through-holes.
3Manufacturing precision
If alignment holes are added to improve alignment accuracy, then alignment precision is improved, but device complexity increases
Solution Approach 1:
The alignment mask serves multiple functions: it provides alignment holes for precise positioning, acts as a structural component joined to the frame, and works in conjunction with the deposition mask. This multi-functionality reduces the need for separate alignment mechanisms, thereby limiting the increase in device complexity while achieving improved alignment precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves alignment accuracy, resulting in higher shape and position accuracy of deposition layers, thereby enhancing the definition and consistency of light emitting layers in organic EL display devices.
Implementation Method 1
A first weld joining the frame with the alignment mask is located in an outer side of the alignment mask in the second direction with respect to a corresponding one of the first alignment mask holes. A second weld joining the frame with the alignment mask is located in an inner side of the alignment mask in the second direction with respect to a corresponding one of the first alignment mask holes.
Data Source
AI summary
A deposition mask apparatus includes a frame, a deposition mask, and an alignment mask. The alignment mask has two first alignment mask holes located at positions different from each other in the second direction and overlapping the frame. A first weld joining the frame with the alignment mask is located in an outer side of the alignment mask in the second direction with respect to a corresponding one of the first alignment mask holes. A second weld joining the frame with the alignment mask is located in an inner side of the alignment mask in the second direction with respect to a corresponding one of the first alignment mask holes.